Issued Patents 2016
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530617 | In-situ charging neutralization | Lin-Jung Wu, Jyh-Shiou Hsu | 2016-12-27 |
| 9449889 | Method for monitoring ion implantation | Chun-Lin Chang, Chih-Hong Hwang, Nai-Han Cheng, Chin-Hsiang Lin | 2016-09-20 |
| 9449864 | Systems and methods for fabricating and orienting semiconductor wafers | Chin-Ming Lin, Wan-Lai Chen, Chia-Hung Huang, Chin-Hsiang Lin | 2016-09-20 |
| 9435048 | Layer by layer electro chemical plating (ECP) process | Su-Horng Lin | 2016-09-06 |
| 9403254 | Methods for real-time error detection in CMP processing | James Jeng-Jyi Hwang, Bo-I Lee, Chin-Hsiang Lin | 2016-08-02 |
| 9368452 | Metal conductor chemical mechanical polish | Soon-Kang Huang, Han-Hsin Kuo, Shwang-Ming Jeng, Chin-Hsiang Lin | 2016-06-14 |
| 9349623 | Fine temperature controllable wafer heating system | Ying-Hsueh Chang Chien | 2016-05-24 |
| 9315892 | Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure | Nai-Han Cheng | 2016-04-19 |
| 9299593 | Semiconductor device cleaning method and apparatus | Ming-Hsi Yeh, Kuo-Sheng Chuang, Ying-Hsueh Chang Chien, Chin-Hsiang Lin | 2016-03-29 |
| 9287133 | Hard mask removal scheme | Ying-Hsueh Changchien, Yu-Ming Lee | 2016-03-15 |
| 9242342 | Manufacture and method of making the same | Bo-I Lee, Huang Soon Kang, Chin-Hsiang Lin | 2016-01-26 |
| 9239192 | Substrate rapid thermal heating system and methods | Nai-Han Cheng | 2016-01-19 |