Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449889 | Method for monitoring ion implantation | Chun-Lin Chang, Chih-Hong Hwang, Chi-Ming Yang, Chin-Hsiang Lin | 2016-09-20 |
| 9315892 | Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure | Chi-Ming Yang | 2016-04-19 |
| 9239192 | Substrate rapid thermal heating system and methods | Chi-Ming Yang | 2016-01-19 |