Issued Patents All Time
Showing 51–75 of 108 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049925 | Metal-semiconductor contact structure with doped interlayer | Yu-Hung Lin, Sheng-Hsuan Lin, Chih-Wei Chang | 2018-08-14 |
| 9982340 | Shower head apparatus and method for controlling plasma or gas distribution | Chih-Tsung Lee, Hung Jui Chang, Shiu-Ko JangJian, Chung-En Kao, Ming-Chin Tsai +1 more | 2018-05-29 |
| 9984924 | Semiconductor device and formation thereof | Yu-Hung Lin, Sheng-Hsuan Lin, Chih-Wei Chang | 2018-05-29 |
| 9984975 | Barrier structure for copper interconnect | Yu-Hung Lin, Ching-Fu Yeh, Yu-Min Chang, Chih-Wei Chang | 2018-05-29 |
| 9976215 | Semiconductor film formation apparatus and process | Chih-Tsung Lee, Shu-Fen Wu, Chin-Hsiang Lin | 2018-05-22 |
| 9966339 | Barrier structure for copper interconnect | Yu-Hung Lin, Ching-Fu Yeh, Yu-Min Chang, Chih-Wei Chang, Sheng-Hsuan Lin | 2018-05-08 |
| 9899296 | Method of forming conductive bumps for cooling device connection | Yi-Jen Lai, Chun-Jen Chen, Perre Kao | 2018-02-20 |
| 9892954 | Wafer processing system using multi-zone chuck | Nai-Han Cheng, Chi-Ming Yang, Kuo-Sheng Chuang, Chin-Hsiang Lin | 2018-02-13 |
| 9865478 | Shielding design for metal gap fill | Ming-Chin Tsai, Bo-Hung Lin, Chung-En Kao | 2018-01-09 |
| 9859390 | Method for silicide formation | Yu-Hung Lin, Sheng-Hsuan Lin, Chih-Wei Chang, Chia-Lin Hsu | 2018-01-02 |
| 9735050 | Composite contact plug structure and method of making same | Yu-Hung Lin, Sheng-Hsuan Lin, Chih-Wei Chang, Chia-Lin Hsu | 2017-08-15 |
| 9718164 | Polishing system and polishing method | Shih-Chi Lin, Kun-Tai Wu, Chih-Tsung Lee, Min Hao Hong, Chih-Jen Wu +4 more | 2017-08-01 |
| 9708706 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, Chen-Chia Chiang, Chih-Tsung Lee, Ming-Shiou Kuo | 2017-07-18 |
| 9685330 | Manufacturing method of semiconductor device | Kuo-Sheng Chuang | 2017-06-20 |
| 9666438 | Semiconductor device and formation thereof | Yu-Hung Lin, Chih-Wei Chang, Sheng-Hsuan Lin | 2017-05-30 |
| 9620601 | Contact structures and methods of forming the same | Yu-Hung Lin, Sheng-Hsuan Lin, Chih-Wei Chang, Chia-Lin Hsu | 2017-04-11 |
| 9607946 | Reverse damascene process | Min Hao Hong, Jian-Shin Tsai, Miao-Cheng Liao, Hsiang Hsiang Ko | 2017-03-28 |
| 9594096 | Probe card for simultaneously testing multiple dies | Yi-Jen Lai | 2017-03-14 |
| 9589892 | Interconnect structure and method of forming the same | Yu-Hung Lin, Mei-Hui Fu, Wei-Jung Lin, Chia-Lin Hsu, Hon-Lin Huang +1 more | 2017-03-07 |
| 9574265 | Rotation plus vibration magnet for magnetron sputtering apparatus | Bo-Hung Lin, Ming-Chih Tsai, Chung-En Kao | 2017-02-21 |
| 9575494 | Mechanisms for processing wafer | Shih-Hung Chen, Jian-Huah Chiou | 2017-02-21 |
| 9536834 | Reverse damascene process | Min Hao Hong, Jian-Shin Tsai, Miao-Cheng Liao, Hsiang Hsiang Ko | 2017-01-03 |
| 9530736 | Semiconductor device and formation thereof | Yu-Hung Lin, Sheng-Hsuan Lin, Chih-Wei Chang | 2016-12-27 |
| 9522810 | Overhead crane | Ta-Yung Lee, Chiao-Ping Cheng, Ying Chi Wu | 2016-12-20 |
| 9502280 | Two-step shallow trench isolation (STI) process | Min Hao Hong, Chih-Tsung Lee, Shiu-Ko JangJian, Miao-Cheng Liao, Hsiang Hsiang Ko +1 more | 2016-11-22 |