YC

Yi-Lung Cheng

TSMC: 26 patents #1,323 of 12,232Top 15%
Overall (All Time): #156,015 of 4,157,543Top 4%
26
Patents All Time

Issued Patents All Time

Showing 1–25 of 26 patents

Patent #TitleCo-InventorsDate
7646207 Method for measuring a property of interconnections and structure for the same Jian-Hong Lin, Chin Chuan Peng, Shou-Chung Lee, Chien-Jung Wang, Chien Shih Tsai +1 more 2010-01-12
7512924 Semiconductor device structure and methods of manufacturing the same Hsien-Wei Chen, Hsueh-Chung Chen, Shin-Puu Jeng 2009-03-31
7470584 TEOS deposition method Hong-Jui Chang, Ying-Lang Wang 2008-12-30
7449911 Method for determining electro-migration failure mode Bi-Ling Liu, Chin-Chuang Peng, Chien Shih Tsai, Hway-Chi Lin 2008-11-11
7420277 System for heat dissipation in semiconductor devices Hsien-Wei Chen, Jiun-Lin Yeh, Shin-Puu Jeng 2008-09-02
7296532 Bypass gas feed system and method to improve reactant gas flow and film deposition Mo-Chen Liao, Eric Tsai, Sze-Au Wu, Ying-Lung Wang 2007-11-20
7253121 Method for forming IMD films Miao-Cheng Liao, Ying-Lang Wang 2007-08-07
7208415 Plasma treatment method for electromigration reduction Jane-Bai Lai 2007-04-24
7176571 Nitride barrier layer to prevent metal (Cu) leakage issue in a dual damascene structure Ying-Lung Wang 2007-02-13
7157367 Device structure having enhanced surface adhesion and failure mode analysis Hway-Chi Lin, Chao-Hsiung Wang 2007-01-02
7125802 CMP process leaving no residual oxide layer or slurry particles Ying-Lang Wang, Shih-Chi Lin, Chi-Wen Liu, Ming-Hua Yoo, Wen-Kung Cheng +1 more 2006-10-24
7078336 Method and system for fabricating a copper barrier layer with low dielectric constant and leakage current Ying-Lang Wang 2006-07-18
7074701 Method of forming a borderless contact opening featuring a composite tri-layer etch stop material Shih-Chia Cheng 2006-07-11
6979656 Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same Shiu-Ko JangJian, Jun Wu, Chi-Wen Liu, Ying-Lung Wang, Michael Chang +1 more 2005-12-27
6903019 CMP process leaving no residual oxide layer or slurry particles Ying-Lang Wang, Shih-Chi Lin, Chi-Wen Liu, Ming-Hua Yoo, Wen-Kung Cheng +1 more 2005-06-07
6815072 Method to solve particle performance of FSG layer by using UFU season film for FSG process Ming-Hwa Yoo, Szu-An Wu, Ying-Lang Wang 2004-11-09
6815007 Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film Ming-Hwa Yoo, Shih-Chi Lin, Szu-An Wu, Ying-Lang Wang 2004-11-09
6802935 Semiconductor chamber process apparatus and method Hui-Chi Lin, Szu-An Wu, Ying-Lang Wang 2004-10-12
6790778 Method for capping over a copper layer Ying-Lang Wang, We-Li Chen 2004-09-14
6759347 Method of forming in-situ SRO HDP-CVD barrier film Ming-Hwa Yoo, Sze-An Wu, Ying-Lung Wang 2004-07-06
6713407 Method of forming a metal nitride layer over exposed copper Wen-Kung Cheng, Sez-An Wu, Yi-Lung Wang, Shin-Chi Lin 2004-03-30
6703317 Method to neutralize charge imbalance following a wafer cleaning process Ming-Hwa Yoo, Sze-An Wu, Ying-Lung Wang 2004-03-09
6660638 CMP process leaving no residual oxide layer or slurry particles Ying-Lang Wang, Shih-Chi Lin, Chi-Wen Liu, Ming-Hua Yoo, Wen-Kung Cheng +1 more 2003-12-09
6602560 Method for removing residual fluorine in HDP-CVD chamber Wen-Kung Cheng, Ming-Hwa Yoo, Szu-An Wu, Ying-Long Wang, Pei-Fen Chou 2003-08-05
6584987 Method for improved cleaning in HDP-CVD process with reduced NF3 usage Chun-Ching Tsan, Wen-Kung Cheng, Yin-Lang Wang 2003-07-01