Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6584987 | Method for improved cleaning in HDP-CVD process with reduced NF3 usage | Yi-Lung Cheng, Wen-Kung Cheng, Yin-Lang Wang | 2003-07-01 |
| 6586347 | Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits | Chung-Shi Liu, Hui Wang, Szu-An Wu, Ying-Lang Wang, Tong-Hua Kuan | 2003-07-01 |
| 6479881 | Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry | Ying-Lang Wang, Jowei Dun, Hung-Ju Chien | 2002-11-12 |
| 6407007 | Method to solve the delamination of a silicon nitride layer from an underlying spin on glass layer | Ying-Lang Wang, Hui Wang, Chin Kun Lan | 2002-06-18 |
| 6399522 | PE-silane oxide particle performance improvement | Hung-Ju Chien, Chun-Chang Chen, Ying-Lang Wang | 2002-06-04 |
| 6323141 | Method for forming anti-reflective coating layer with enhanced film thickness uniformity | Szu-Au Wu, Wen-Kung Cheng, Ying-Lang Wang | 2001-11-27 |
| 6268274 | Low temperature process for forming inter-metal gap-filling insulating layers in silicon wafer integrated circuitry | Ying-Lang Wang, Jowei Dun, Hung-Ju Chien | 2001-07-31 |
| 6136680 | Methods to improve copper-fluorinated silica glass interconnects | Jane-Bai Lai, Chung-Shi Liu, Tien-I Bao, Syun-Ming Jang, Chung-Long Chang +4 more | 2000-10-24 |