Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6584987 | Method for improved cleaning in HDP-CVD process with reduced NF3 usage | Yi-Lung Cheng, Chun-Ching Tsan, Wen-Kung Cheng | 2003-07-01 |
| 6499222 | Template for measuring edge width and method of using | Hung-Ju Chien, Ying Chen, Wen-Kung Cheng | 2002-12-31 |
| 6235653 | Ar-based si-rich oxynitride film for dual damascene and/or contact etch stop layer | Hung-Ju Chien, Yuan-Hung Chiu, Wen-Kung Cheng | 2001-05-22 |