Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287151 | Systems and method for transferring a semiconductor substrate | Ping-Yuan CHEN, Chyi-Tsong Ni, Huai Huang | 2016-03-15 |
| 7772625 | Image sensor having an RPO layer containing nitrogen | Yao-Hsiang Liang, Chen-Peng Fan, Ming-Hsien Chen, Richard Chen, Jung-Chen Yang +4 more | 2010-08-10 |
| 7125802 | CMP process leaving no residual oxide layer or slurry particles | Ying-Lang Wang, Shih-Chi Lin, Yi-Lung Cheng, Chi-Wen Liu, Ming-Hua Yoo +1 more | 2006-10-24 |
| 6903019 | CMP process leaving no residual oxide layer or slurry particles | Ying-Lang Wang, Shih-Chi Lin, Yi-Lung Cheng, Chi-Wen Liu, Ming-Hua Yoo +1 more | 2005-06-07 |
| 6713407 | Method of forming a metal nitride layer over exposed copper | Yi-Lung Cheng, Sez-An Wu, Yi-Lung Wang, Shin-Chi Lin | 2004-03-30 |
| 6660638 | CMP process leaving no residual oxide layer or slurry particles | Ying-Lang Wang, Shih-Chi Lin, Yi-Lung Cheng, Chi-Wen Liu, Ming-Hua Yoo +1 more | 2003-12-09 |
| 6602560 | Method for removing residual fluorine in HDP-CVD chamber | Yi-Lung Cheng, Ming-Hwa Yoo, Szu-An Wu, Ying-Long Wang, Pei-Fen Chou | 2003-08-05 |
| 6584987 | Method for improved cleaning in HDP-CVD process with reduced NF3 usage | Yi-Lung Cheng, Chun-Ching Tsan, Yin-Lang Wang | 2003-07-01 |
| 6558228 | Method of unloading substrates in chemical-mechanical polishing apparatus | Hung-Ju Chien, Jin C J Chen, Ying-Lang Wang | 2003-05-06 |
| 6499222 | Template for measuring edge width and method of using | Hung-Ju Chien, Ying Chen, Yin-Lang Wang | 2002-12-31 |
| 6323141 | Method for forming anti-reflective coating layer with enhanced film thickness uniformity | Szu-Au Wu, Chun-Ching Tsan, Ying-Lang Wang | 2001-11-27 |
| 6235653 | Ar-based si-rich oxynitride film for dual damascene and/or contact etch stop layer | Hung-Ju Chien, Yuan-Hung Chiu, Yin-Lang Wang | 2001-05-22 |
| 6136680 | Methods to improve copper-fluorinated silica glass interconnects | Jane-Bai Lai, Chung-Shi Liu, Tien-I Bao, Syun-Ming Jang, Chung-Long Chang +4 more | 2000-10-24 |