Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6890772 | Method and apparatus for determining two dimensional doping profiles with SIMS | Chin-Kai Liu, Jun-Yean Chiou, Han-Shun Lui | 2005-05-10 |
| 6780783 | Method of wet etching low dielectric constant materials | Jane-Bai Lai | 2004-08-24 |
| 6602560 | Method for removing residual fluorine in HDP-CVD chamber | Yi-Lung Cheng, Wen-Kung Cheng, Ming-Hwa Yoo, Szu-An Wu, Ying-Long Wang | 2003-08-05 |
| 5624867 | Low temperature formation of palladium silicided shallow junctions using implant through metal/silicide technology | Huang-Chung Cheng, Cheng-Tung Lin | 1997-04-29 |