SW

Szu-An Wu

TSMC: 36 patents #941 of 12,232Top 8%
📍 Tainan, TW: #136 of 4,566 inventorsTop 3%
Overall (All Time): #94,005 of 4,157,543Top 3%
36
Patents All Time

Issued Patents All Time

Showing 1–25 of 36 patents

Patent #TitleCo-InventorsDate
11018176 Metal shielding layer in backside illumination image sensor chips and methods for forming the same Shih-Chieh Chang, Jian-Shin Tsai, Chih-Chang Huang, Ing-Ju Lee, Ching-Yao Sun +3 more 2021-05-25
10276621 Metal shielding layer in backside illumination image sensor chips and methods for forming the same Shih-Chieh Chang, Jian-Shin Tsai, Chih-Chang Huang, Ing-Ju Lee, Ching-Yao Sun +3 more 2019-04-30
9978784 Grids in backside illumination image sensor chips and methods for forming the same Shiu-Ko JangJian, Sheng-Wen Chen 2018-05-22
9786707 Image sensor isolation region and method of forming the same Shiu-Ko JangJian, Min Hao Hong, Kei-Wei Chen 2017-10-10
9673244 Image sensor isolation region and method of forming the same Shiu-Ko JangJian, Min Hao Hong, Kei-Wei Chen 2017-06-06
9620555 Metal shielding layer in backside illumination image sensor chips and methods for forming the same Shih-Chieh Chang, Jian-Shin Tsai, Chih-Chang Huang, Ing-Ju Lee, Ching-Yao Sun +3 more 2017-04-11
9543234 In-situ formation of silicon and tantalum containing barrier Shiu-Ko JangJian, Ting-Chun Wang 2017-01-10
9502290 Oxidation-free copper metallization process using in-situ baking Yu-Sheng Wang, Shih-Ho Lin, Kei-Wei Chen, Ying-Lang Wang 2016-11-22
9224773 Metal shielding layer in backside illumination image sensor chips and methods for forming the same Shih-Chieh Chang, Jian-Shin Tsai, Chih-Chang Huang, Ing-Ju Lee, Ching-Yao Sun +3 more 2015-12-29
9219092 Grids in backside illumination image sensor chips and methods for forming the same Shiu-Ko JangJian, Sheng-Wen Chen 2015-12-22
9123608 Backside illuminated CMOS image sensor Shiu-Ko JangJian, Volume Chien 2015-09-01
8946083 In-situ formation of silicon and tantalum containing barrier Shiu-Ko JangJian, Ting-Chun Wang 2015-02-03
8847286 Image sensor and method of manufacturing Shiu-Ko JangJian, Kei-Wei Chen, Ying-Lang Wang 2014-09-30
8778602 Single photoresist approach for high challenge photo process Hung-Ting Pan, Jing-Huan Chen, Wei-Chung Ma, Hsin-Chun Chiang, Po-Chung Cheng 2014-07-15
8470390 Oxidation-free copper metallization process using in-situ baking Yu-Sheng Wang, Shih-Ho Lin, Kei-Wei Chen, Ying-Lang Wang 2013-06-25
8294202 Metal gate structure of a semiconductor device Shiu-Ko JangJian, Sheng-Wen Chen 2012-10-23
8021992 High aspect ratio gap fill application using high density plasma chemical vapor deposition Joung-Wei Liou, Tsang-Yu Liu, Chien-Feng Lin, Cheng-Liang Chang, Ming-Te Chen +3 more 2011-09-20
7611589 Methods of spin-on wafer cleaning Jun Wu, Dong Lu, Shih-Chi Lin, Wen-Long Lee, Yi-An Jian +4 more 2009-11-03
7349086 Systems and methods for optical measurement Joung-Wei Liou, Jacky Huang, Chih-Ming Ke 2008-03-25
6985222 Chamber leakage detection by measurement of reflectivity of oxidized thin film Hsi-Kuei Cheng, Chu-Chang Chen, Ting-Chun Wang, Ying-Lang Wang, Hsien-Ping Feng 2006-01-10
6979656 Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same Shiu-Ko JangJian, Jun Wu, Chi-Wen Liu, Ying-Lung Wang, Yi-Lung Cheng +1 more 2005-12-27
6815007 Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film Ming-Hwa Yoo, Shih-Chi Lin, Yi-Lung Cheng, Ying-Lang Wang 2004-11-09
6815072 Method to solve particle performance of FSG layer by using UFU season film for FSG process Ming-Hwa Yoo, Yi-Lung Cheng, Ying-Lang Wang 2004-11-09
6802935 Semiconductor chamber process apparatus and method Yi-Lung Cheng, Hui-Chi Lin, Ying-Lang Wang 2004-10-12
6784077 Shallow trench isolation process Shih-Chi Lin, Chih-Chung Lee, Guey Bao Huang, Ying-Lang Wang, Chun-Chun Yeh 2004-08-31