Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815007 | Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film | Shih-Chi Lin, Yi-Lung Cheng, Szu-An Wu, Ying-Lang Wang | 2004-11-09 |
| 6815072 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Yi-Lung Cheng, Szu-An Wu, Ying-Lang Wang | 2004-11-09 |
| 6759347 | Method of forming in-situ SRO HDP-CVD barrier film | Yi-Lung Cheng, Sze-An Wu, Ying-Lung Wang | 2004-07-06 |
| 6703317 | Method to neutralize charge imbalance following a wafer cleaning process | Yi-Lung Cheng, Sze-An Wu, Ying-Lung Wang | 2004-03-09 |
| 6602560 | Method for removing residual fluorine in HDP-CVD chamber | Yi-Lung Cheng, Wen-Kung Cheng, Szu-An Wu, Ying-Long Wang, Pei-Fen Chou | 2003-08-05 |
| 6479098 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Yi-Lung Cheng, Szu-An Wu, Ying-Lang Wang | 2002-11-12 |