Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580100 | Metal deposition using seed layers | Gang Chen, Yu Bo, Zhifeng Ren, Shuo Chen, Bed Poudel | 2013-11-12 |
| 7667835 | Apparatus and method for preventing copper peeling in ECP | Hsi-Kuei Cheng, Jung-Chih Tsao, Ming-Yuan Cheng, Steven Lin, Ray Chuang | 2010-02-23 |
| 7528478 | Semiconductor devices having post passivation interconnections and a buffer layer | Hsi-Kuei Cheng, Hung-Ju Chien, Hsun-Chang Chan, Chu-Chang Chen, Ying-Lang Wang +2 more | 2009-05-05 |
| 7481910 | Method and apparatus for stabilizing plating film impurities | Ming-Yuang Cheng, Si Cheng, Steven Lin, Jung-Chih Tsao, Chen-Peng Fan +1 more | 2009-01-27 |
| 7432192 | Post ECP multi-step anneal/H2 treatment to reduce film impurity | Jung-Chih Tsao, Hsi-Kuei Cheng, Chih-Tsung Lee, Ming-Yuan Cheng, Steven Lin +2 more | 2008-10-07 |
| 7262067 | Method for conductive film quality evaluation | Min-Yuan Cheng, Hsi-Kuei Cheng, Steven Lin, Huang-Yi Huang, Yuh-Da Fan | 2007-08-28 |
| 7256120 | Method to eliminate plating copper defect | Jung-Chin Tsao, Chi-Wen Liu, Hsi-Kuei Cheng, Steven Lin, Min-Yuan Cheng | 2007-08-14 |
| 7189650 | Method and apparatus for copper film quality enhancement with two-step deposition | Chi-Wen Liu, Jung-Chih Tsao | 2007-03-13 |
| 7122471 | Method for preventing voids in metal interconnects | Jung-Chih Tsao, Chi-Wen Liu, Si-Kua Cheng, Che-Tsao Wang, Steven Lin +1 more | 2006-10-17 |
| 7030016 | Post ECP multi-step anneal/H2 treatment to reduce film impurity | Jung-Chih Tsao, Hsi-Kuei Cheng, Chih-Tsung Lee, Ming-Yuan Cheng, Steven Lin +2 more | 2006-04-18 |
| 7026233 | Method for reducing defects in post passivation interconnect process | Hsi-Kuei Cheng, Hung-Ju Chien, Hsun-Chang Chan, Chu-Chang Chen, Ying-Lang Wang +2 more | 2006-04-11 |
| 6985222 | Chamber leakage detection by measurement of reflectivity of oxidized thin film | Hsi-Kuei Cheng, Chu-Chang Chen, Ting-Chun Wang, Szu-An Wu, Ying-Lang Wang | 2006-01-10 |