Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564321 | Cyclic epitaxial deposition and etch processes | Chun Hsiung Tsai, Meng-Yueh Liu, Chien-Chang Su, Yuan-feng Chao | 2017-02-07 |
| 7262067 | Method for conductive film quality evaluation | Hsien-Ping Feng, Min-Yuan Cheng, Hsi-Kuei Cheng, Steven Lin, Huang-Yi Huang | 2007-08-28 |
| 6936544 | Method of removing metal etching residues following a metal etchback process to improve a CMP process | Yai-Yei Huang | 2005-08-30 |
| 6531326 | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Ching-Ming Chen, Pao-Ling Kuo | 2003-03-11 |
| 6303509 | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Ching-Ming Chen, Pao-Ling Kuo | 2001-10-16 |
| 6221745 | High selectivity mask oxide etching to suppress silicon pits | — | 2001-04-24 |
| 6124212 | High density plasma (HDP) etch method for suppressing micro-loading effects when etching polysilicon layers | Weng-Liang Fang | 2000-09-26 |
| 6022809 | Composite shadow ring for an etch chamber and method of using | — | 2000-02-08 |
| 5854136 | Three-step nitride etching process for better critical dimension and better vertical sidewall profile | Shih-Chang Huang, Yung-Jung Chang | 1998-12-29 |