Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7294043 | CMP apparatus and process sequence method | Chen-Shien Chen, Ming-Hsiang Kao, Yih-Shung Lin, Winata Karta Tjandra | 2007-11-13 |
| 7118451 | CMP apparatus and process sequence method | Chen-Shien Chen, Ming-Hsiang Kao, Yih-Shung Lin, Winata Karta Tjandra | 2006-10-10 |
| 7004814 | CMP process control method | Chen-Shien Chen, Yean-Zhaw Chen, Kai-Hsiung Chen, Yih-Shung Lin | 2006-02-28 |
| 6936544 | Method of removing metal etching residues following a metal etchback process to improve a CMP process | Yuh-Da Fan | 2005-08-30 |