Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7294043 | CMP apparatus and process sequence method | Chen-Shien Chen, Yai-Yei Huang, Ming-Hsiang Kao, Yih-Shung Lin | 2007-11-13 |
| 7118451 | CMP apparatus and process sequence method | Chen-Shien Chen, Yai-Yei Huang, Ming-Hsiang Kao, Yih-Shung Lin | 2006-10-10 |