Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531326 | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Ching-Ming Chen, Yuh-Da Fan | 2003-03-11 |
| 6303509 | Method to calibrate the wafer transfer for oxide etcher (with clamp) | Ching-Ming Chen, Yuh-Da Fan | 2001-10-16 |
| 5454871 | SOG coated apparatus to solve SOG non-uniformity in the VLSI process | Yung-Haw Liaw, Hsin-Chieh Huang | 1995-10-03 |
| 5371046 | Method to solve sog non-uniformity in the VLSI process | Yung-Haw Liaw, Hsin-Chieh Huang | 1994-12-06 |