Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972951 | Selective formation of titanium silicide and titanium nitride by hydrogen gas control | Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Yu-Ting Lin | 2024-04-30 |
| 11444028 | Contact structure and formation thereof | Hong-Mao Lee, Huicheng Chang, Chia-Han Lai, Chi-Hsuan Ni, Cheng-Tung Lin +4 more | 2022-09-13 |
| 11295956 | Selective formation of titanium silicide and titanium nitride by hydrogen gas control | Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Yu-Ting Lin | 2022-04-05 |
| 11011611 | Semiconductor device with low resistivity contact structure | Min-Hsiu Hung, Yi-Hsiang Chao, Kuan-Yu Yeh, Kan-Ju Lin, Chun-Wen Nieh +2 more | 2021-05-18 |
| 10879075 | Wrap-around contact plug and method manufacturing same | Sung-Li Wang, Jyh-Cherng Sheu, Chih-Wei Chang, Chi On Chui | 2020-12-29 |
| 10714334 | Conductive feature formation and structure | Cheng-Wei Chang, Chun-Chieh Wang, Yu-Ting Lin, Min-Hsiu Hung | 2020-07-14 |
| 10700177 | Semiconductor device with low resistivity contact structure and method for forming the same | Min-Hsiu Hung, Yi-Hsiang Chao, Kuan-Yu Yeh, Kan-Ju Lin, Chun-Wen Nieh +2 more | 2020-06-30 |
| 10685842 | Selective formation of titanium silicide and titanium nitride by hydrogen gas control | Cheng-Wei Chang, Kao-Feng Lin, Min-Hsiu Hung, Yi-Hsiang Chao, Yu-Ting Lin | 2020-06-16 |
| 10658234 | Formation method of interconnection structure of semiconductor device | Min-Hsiu Hung, Sung-Li Wang, Pei-Wen Wu, Yida Li, Chih-Wei Chang +4 more | 2020-05-19 |
| 10636664 | Wrap-around contact plug and method manufacturing same | Sung-Li Wang, Jyh-Cherng Sheu, Chih-Wei Chang, Chi On Chui | 2020-04-28 |
| 10510664 | Contact structure and formation thereof | Hong-Mao Lee, Huicheng Chang, Chia-Han Lai, Chi-Hsuan Ni, Cheng-Tung Lin +4 more | 2019-12-17 |
| 10475654 | Wrap-around contact plug and method manufacturing same | Sung-Li Wang, Jyh-Cherng Sheu, Chih-Wei Chang, Chi On Chui | 2019-11-12 |
| 10468260 | Wrap-around contact plug and method manufacturing same | Sung-Li Wang, Jyh-Cherng Sheu, Chih-Wei Chang, Chi On Chui | 2019-11-05 |
| 10283359 | Systems and methods for gap filling improvement | Chi-Yuan Chen, Li-Ting Wang, Teng-Chun Tsai, Chun-I Tsai, Wei-Jung Lin +2 more | 2019-05-07 |
| 10103099 | Semiconductor devices and methods of forming same | Chih-Chien Chi, Szu-Ping Tung, Ching-Hua Hsieh | 2018-10-16 |
| 9991125 | Method for forming semiconductor device structure | Rueijer Lin, Chen-Yuan Kao, Chun-Chieh Lin | 2018-06-05 |
| 9966448 | Method of making a silicide beneath a vertical structure | Cheng-Tung Lin, Teng-Chun Tsai, Li-Ting Wang, De-Fang Chen, Hui-Cheng Chang +2 more | 2018-05-08 |
| 9899258 | Metal liner overhang reduction and manufacturing method thereof | Pei-Wen Wu, Sung-Li Wang, Min-Hsiu Hung, Yida Li, Chih-Wei Chang +4 more | 2018-02-20 |
| 9873944 | Metal capping process and processing platform thereof | Chih-Chien Chi, Szu-Ping Tung, Ching-Hua Hsieh | 2018-01-23 |
| 9805968 | Vertical structure having an etch stop over portion of the source | Cheng-Tung Lin, Teng-Chun Tsai, Li-Ting Wang, De-Fang Chen, Bing Chen +3 more | 2017-10-31 |
| 9735107 | Contact structure and formation thereof | Hong-Mao Lee, Huicheng Chang, Chia-Han Lai, Chi-Hsuan Ni, Cheng-Tung Lin +4 more | 2017-08-15 |
| 9640428 | Self-aligned repairing process for barrier layer | Chih-Chien Chi, Chung-Chi Ko, Mei-Ling Chen, Szu-Ping Tung, Ching-Hua Hsieh | 2017-05-02 |
| 9624576 | Systems and methods for gap filling improvement | Chi-Yuan Chen, Li-Ting Wang, Teng-Chun Tsai, Chun-I Tsai, Wei-Jung Lin +2 more | 2017-04-18 |
| 9601430 | Semiconductor device structure and method for forming the same | Rueijer Lin, Chen-Yuan Kao, Chun-Chieh Lin | 2017-03-21 |
| 9589800 | Method for integrated circuit patterning | Szu-Ping Tung, Ching-Hua Hsieh, Neng-Jye Yang | 2017-03-07 |