ST

Szu-Ping Tung

TSMC: 36 patents #941 of 12,232Top 8%
Overall (All Time): #91,476 of 4,157,543Top 3%
36
Patents All Time

Issued Patents All Time

Showing 1–25 of 36 patents

Patent #TitleCo-InventorsDate
12400875 Film deposition for patterning process Ssu-Yu Ho, Ching-Yu Chang 2025-08-26
12374588 Method for evaluating non-uniform stress Wei-De Ho, Han-Wei Wu, Pei-Sheng TANG, Meng-Jung Lee, Hua-Tai Lin +1 more 2025-07-29
12205824 Patterning material including silicon-containing layer and method for semiconductor device fabrication Chun-Kai Chen, Yi-Nien Su, Tze-Liang Lee 2025-01-21
12159838 Method of forming an interconnect structure having an air gap and structure thereof Chih-Chien Chi, Hung-Wen Su 2024-12-03
12057445 Method of manufacturing a semiconductor device and a semiconductor device Wen-Tzu Chen, Guan-Yao Tu, Hsiang-Ku Shen, Chen-Chiu Huang, Dian-Hau Chen 2024-08-06
11991930 Memory device and method for fabricating the same Jung-Tang Wu, Szu-Hua Wu, Shing-Chyang Pan, Meng-Yu Wu 2024-05-21
11804410 Thin-film non-uniform stress evaluation Wei-De Ho, Han-Wei Wu, Pei-Sheng TANG, Meng-Jung Lee, Hua-Tai Lin +1 more 2023-10-31
11769693 Metal-based etch-stop layer Yu-Kai Lin, Jen Hung Wang, Shing-Chyang Pan 2023-09-26
11715640 Patterning material including silicon-containing layer and method for semiconductor device fabrication Chun-Kai Chen, Tze-Liang Lee, Yi-Nien Su 2023-08-01
11682624 Method of forming an interconnect structure having an air gap and structure thereof Chih-Chien Chi, Hung-Wen Su 2023-06-20
11651993 Etch stop layer for semiconductor devices Jen Hung Wang, Shing-Chyang Pan 2023-05-16
11515474 Memory device and method for fabricating the same Jung-Tang Wu, Szu-Hua Wu, Shing-Chyang Pan, Meng-Yu Wu 2022-11-29
11322396 Etch stop layer for semiconductor devices Jen Hung Wang, Shing-Chyang Pan 2022-05-03
11004793 Method of forming an interconnect structure having an air gap and structure thereof Chih-Chien Chi, Hung-Wen Su 2021-05-11
11004734 Metal-based etch-stop layer Yu-Kai Lin, Jen Hung Wang, Shing-Chyang Pan 2021-05-11
10867794 Patterning method for semiconductor devices and structures resulting therefrom Ching-Yu Chang, Jung-Hau Shiu, Chun-Kai Chen, Jen Hung Wang, Tze-Liang Lee 2020-12-15
10862026 Memory device Jung-Tang Wu, Szu-Hua Wu, Shing-Chyang Pan, Meng-Yu Wu 2020-12-08
10685873 Etch stop layer for semiconductor devices Jen Hung Wang, Shing-Chyang Pan 2020-06-16
10535816 Via structure, MRAM device using the via structure and method for fabricating the MRAM device Jung-Tang Wu, Szu-Hua Wu, Shing-Chyang Pan, Meng-Yu Wu 2020-01-14
10468297 Metal-based etch-stop layer Yu-Kai Lin, Jen Hung Wang, Shing-Chyang Pan 2019-11-05
10340223 Method of forming an interconnect structure having an air gap and structure thereof Chih-Chien Chi, Hung-Wen Su 2019-07-02
10103099 Semiconductor devices and methods of forming same Chih-Chien Chi, Huang-Yi Huang, Ching-Hua Hsieh 2018-10-16
9917058 Method of forming an interconnect structure having an air gap and structure thereof Chih-Chien Chi, Hung-Wen Su 2018-03-13
9873944 Metal capping process and processing platform thereof Chih-Chien Chi, Huang-Yi Huang, Ching-Hua Hsieh 2018-01-23
9640428 Self-aligned repairing process for barrier layer Chih-Chien Chi, Chung-Chi Ko, Mei-Ling Chen, Huang-Yi Huang, Ching-Hua Hsieh 2017-05-02