TK

Tong-Hua Kuan

TSMC: 7 patents #3,492 of 12,232Top 30%
Overall (All Time): #758,588 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
6645825 Planarization of shallow trench isolation (STI) Chin Kun Lan, Ting-Chun Wang, Ying-Lang Wang 2003-11-11
6586347 Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits Chung-Shi Liu, Hui Wang, Szu-An Wu, Chun-Ching Tsan, Ying-Lang Wang 2003-07-01
6551927 CoSix process to improve junction leakage Dian-Hau Chen, Kwang-Ming Lin, Yu-Ku Lin, Jin-Kuen Lan 2003-04-22
6531382 Use of a capping layer to reduce particle evolution during sputter pre-clean procedures Tao Cheng, Wen-Hsin Huang, Jiun-Pyng You, Lin-June Wu, Shih-Tzung Chang +4 more 2003-03-11
6291331 Re-deposition high compressive stress PECVD oxide film after IMD CMP process to solve more than 5 metal stack via process IMD crack issue Ying-Lang Wang, Jowei Dun, Ming-Jer Lee 2001-09-18
6287172 Method for improvement of tungsten chemical-mechanical polishing process Hui Wang, Ying-Lang Wang, Chin Kun Lan 2001-09-11
6248002 Obtaining the better defect performance of the fuse CMP process by adding slurry polish on more soft pad after slurry polish Hui Wang, Ying-Lang Wang, Yu-Ku Lin 2001-06-19