Issued Patents All Time
Showing 101–125 of 155 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816892 | Method of manufacturing photo masks | Chien-Cheng Chen, Chia-Jen Chen, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2020-10-27 |
| 10747103 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Chih-Cheng Lin, Yao-Ching Ku, Wei-Jen Lo +3 more | 2020-08-18 |
| 10670959 | Pellicle and method of using the same | Chue-San Yoo, Pei-Cheng Hsu, Yun-Yue Lin | 2020-06-02 |
| 10534256 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Ta-Cheng Lien, Chih-Cheng Lin, Jeng-Horng Chen | 2020-01-14 |
| 10514597 | Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same | Yun-Yue Lin, Chia-Jen Chen, Chih-Cheng Lin, Anthony Yen, Chin-Hsiang Lin | 2019-12-24 |
| 10394114 | Chromeless phase shift mask structure and process | Yun-Yue Lin | 2019-08-27 |
| 10353285 | Pellicle structures and methods of fabricating thereof | Pei-Cheng Hsu, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2019-07-16 |
| 10345695 | Extreme ultraviolet alignment marks | Yi-Fu Hsieh, Chih-Chiang Tu, Jong-Yuh Chang | 2019-07-09 |
| 10295899 | Photomask including fiducial mark, method of patterning the photomask and method of making semiconductor device using the photomask | Chia-Jen Chen, Chih-Cheng Lin, Ping-Hsun Lin | 2019-05-21 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Shinn-Sheng Yu +2 more | 2019-04-30 |
| 10162258 | Pellicle fabrication methods and structures thereof | Yun-Yue Lin, Hsuan-Chen Chen, Chih-Cheng Lin, Yao-Ching Ku, Wei-Jen Lo +3 more | 2018-12-25 |
| 10036951 | Pellicle assembly and fabrication methods thereof | Pei-Cheng Hsu, Chih-Cheng Lin, Ta-Cheng Lien, Anthony Yen | 2018-07-31 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chun-Lang Chen, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai +3 more | 2018-07-03 |
| 10001701 | Pellicle structures and methods of fabricating thereof | Pei-Cheng Hsu, Yun-Yue Lin, Hsuan-Chen Chen, Hsuan-I WANG, Anthony Yen | 2018-06-19 |
| 9995999 | Lithography mask | Yun-Yue Lin, Chia-Jen Chen, Anthony Yen | 2018-06-12 |
| 9897910 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Anthony Yen | 2018-02-20 |
| 9869928 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Tao Huang, Chih-Tsung Shih, Chia-Jen Chen, Anthony Yen | 2018-01-16 |
| 9759997 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Ta-Cheng Lien, Chih-Cheng Lin, Jeng-Horng Chen | 2017-09-12 |
| D794954 | Tool storage box | Nadin Daniel Horovitz | 2017-08-22 |
| 9651857 | Mask and method for forming the same | Yun-Yue Lin, Chia-Jen Chen, Ta-Cheng Lien, Anthony Yen | 2017-05-16 |
| 9557649 | Assist feature for a photolithographic process | Tao Huang, Chia-Jen Chen, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2017-01-31 |
| 9535317 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Ta-Cheng Lien, Wei-Shiuan Chen, Anthony Yen | 2017-01-03 |
| 9530200 | Method and system for inspection of a patterned structure | Wen-Chang Hsueh, Chia-Jen Chen | 2016-12-27 |
| 9429835 | Structure and method of photomask with reduction of electron-beam scatterring | Wen-Chang Hsueh, Chia-Jen Chen | 2016-08-30 |
| 9366953 | Lithography mask | Yun-Yue Lin, Chia-Jen Chen, Anthony Yen | 2016-06-14 |