Issued Patents All Time
Showing 76–92 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699530 | Method for constructing a film on a semiconductor wafer | Marvin Liao, Eric A. Englhardt, Mei Chang, Yeh-Jen Kao, Dale R. DuBois +1 more | 2004-03-02 |
| 6673716 | Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques | Gerard C. D'Couto, George Tkach, Michael Woitge | 2004-01-06 |
| 6652718 | Use of RF biased ESC to influence the film properties of Ti and TiN | Gerard C. D'Couto, George Tkach | 2003-11-25 |
| 6642146 | Method of depositing copper seed on semiconductor substrates | Robert T. Rozbicki, Erich R. Klawuhn | 2003-11-04 |
| 6607977 | Method of depositing a diffusion barrier for copper interconnect applications | Robert T. Rozbicki, Erich R. Klawuhn | 2003-08-19 |
| 6566246 | Deposition of conformal copper seed layers by control of barrier layer morphology | Tarek Suwwan de Felipe, Erich R. Klawuhn, Alexander Dulkin | 2003-05-20 |
| 6554914 | Passivation of copper in dual damascene metalization | Robert T. Rozbicki, Ronald A. Powell, Erich R. Klawuhn, Karl B. Levy, Jonathan D. Reid +2 more | 2003-04-29 |
| 6541374 | Method of depositing a diffusion barrier for copper interconnection applications | Tarek Suwwan de Felipe, Erich R. Klawuhn, Ronald A. Powell | 2003-04-01 |
| 6534404 | Method of depositing diffusion barrier for copper interconnect in integrated circuit | Karl B. Levy, Hyoun S. Choe | 2003-03-18 |
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Marvin Liao, Roderick C. Mosely, Karl A. Littau, Ivo Raaijmakers +1 more | 2002-12-31 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Marvin Liao, Roderick C. Mosely, Karl A. Littau, Ivo Raaijmakers +1 more | 2002-09-03 |
| 6270859 | Plasma treatment of titanium nitride formed by chemical vapor deposition | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 2001-08-07 |
| 6251758 | Construction of a film on a semiconductor wafer | Chyi Chern, Marvin Liao, Roderick C. Mosely, Karl A. Littau, Ivo Raaijmakers +1 more | 2001-06-26 |
| 6129044 | Apparatus for substrate processing with improved throughput and yield | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 2000-10-10 |
| 5964947 | Removable pumping channel liners within a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1999-10-12 |
| 5942799 | Multilayer diffusion barriers | Karl B. Levy | 1999-08-24 |
| 5846332 | Thermally floating pedestal collar in a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1998-12-08 |