Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673716 | Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques | George Tkach, Michael Woitge, Michal Danek | 2004-01-06 |
| 6652718 | Use of RF biased ESC to influence the film properties of Ti and TiN | George Tkach, Michal Danek | 2003-11-25 |
| 6342133 | PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter | George Tkach, Jeff Dewayne Lyons, Max Biberger, Kwok Fai Lai, Jean Lu +1 more | 2002-01-29 |