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Max Biberger

NS Novellus Systems: 1 patents #479 of 780Top 65%
Overall (All Time): #3,534,951 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6342133 PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter Gerard C. D'Couto, George Tkach, Jeff Dewayne Lyons, Kwok Fai Lai, Jean Lu +1 more 2002-01-29