GT

George Tkach

NS Novellus Systems: 3 patents #254 of 780Top 35%
Overall (All Time): #1,601,725 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6673716 Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques Gerard C. D'Couto, Michael Woitge, Michal Danek 2004-01-06
6652718 Use of RF biased ESC to influence the film properties of Ti and TiN Gerard C. D'Couto, Michal Danek 2003-11-25
6342133 PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter Gerard C. D'Couto, Jeff Dewayne Lyons, Max Biberger, Kwok Fai Lai, Jean Lu +1 more 2002-01-29