Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107765 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Andrei V. Shchegrov, Stilian Ivanov Pandev | 2018-10-23 |
| 10101676 | Spectroscopic beam profile overlay metrology | Jiyou Fu, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-10-16 |
| 10072921 | Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element | Jiyou Fu, Kevin Peterlinz, Stilian Ivanov Pandev | 2018-09-11 |
| 10062157 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, John J. Hench | 2018-08-28 |
| 9915524 | Optical metrology with small illumination spot size | Kevin Peterlinz, Alexander Buettner, Kerstin Purrucker, Andrei V. Shchegrov | 2018-03-13 |
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2017-11-14 |
| 9784690 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Andrei V. Shchegrov, Stilian Ivanov Pandev | 2017-10-10 |
| 9739719 | Measurement systems having linked field and pupil signal detection | Jiyou Fu | 2017-08-22 |
| 9739702 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Irina Paykin, Alexander Svizher +4 more | 2017-08-22 |
| 9645079 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Daniel Kandel | 2017-05-09 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more | 2017-02-28 |
| 9546946 | Metrology target indentification, design and verification | Boris Golovanevsky | 2017-01-17 |
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, John J. Hench | 2016-12-13 |
| 9490182 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2016-11-08 |
| 9255895 | Angle-resolved antisymmetric scatterometry | Daniel Kandel, Vladimir Levinski | 2016-02-09 |
| 9164397 | Optics symmetrization for metrology | Amnon Manassen, Daniel Kandel, Moshe Baruch, Joel Seligson, Alexander Svizher +4 more | 2015-10-20 |
| 9104120 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Daniel Kandel | 2015-08-11 |
| 8848186 | Angle-resolved antisymmetric scatterometry | Daniel Kandel, Vladimir Levinski | 2014-09-30 |
| 8681413 | Illumination control | Amnon Manassen, Joel Seligson | 2014-03-25 |
| 8582114 | Overlay metrology by pupil phase analysis | Amnon Manassen, Daniel Kandel, Moshe Baruch, Vladimir Levinski, Joel Seligson +4 more | 2013-11-12 |