Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7335894 | High current density particle beam system | Juergen Frosien, Stefan Lanio, Gerald Schoenecker, David A. Crewe | 2008-02-26 |
| 7091486 | Method and apparatus for beam current fluctuation correction | Mark A. McCord | 2006-08-15 |
| 6977375 | Multi-beam multi-column electron beam inspection system | Edward Yin, N. William Parker, Frank Tsai | 2005-12-20 |
| 6844550 | Multi-beam multi-column electron beam inspection system | Edward Yin, N. William Parker, Frank Tsai | 2005-01-18 |
| 6617587 | Electron optics for multi-beam electron beam lithography tool | N. William Parker, George Xinsheng Guo, Edward Yin, Michael C. Matter | 2003-09-09 |
| 6316164 | Proximity effect correction method through uniform removal of fraction of interior pixels | N. William Parker, Daniel L. Cavan, John H. McCoy | 2001-11-13 |
| 5717204 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Zhong-Wei Chen, Jack Jau | 1998-02-10 |
| 5665968 | Inspecting optical masks with electron beam microscopy | Dan Meisburger, Zhong-Wei Chen, Jack Jau, Brian J. Grenon | 1997-09-09 |
| 5578821 | Electron beam inspection system and method | Dan Meisberger, Anil Desai, Dennis G. Emge, Zhong-Wei Chen, Richard R. Simmons +7 more | 1996-11-26 |
| 5502306 | Electron beam inspection system and method | Dan Meisburger, Curt H. Chadwick, Anil Desai, Hans-Peter Dohse, Dennis G. Emge +28 more | 1996-03-26 |