Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7741012 | Method for removal of immersion lithography medium in immersion lithography processes | Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Ivan Lalovic +3 more | 2010-06-22 |
| 7014966 | Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems | Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Ivan Lalovic +3 more | 2006-03-21 |
| 6977375 | Multi-beam multi-column electron beam inspection system | Edward Yin, Alan D. Brodie, N. William Parker | 2005-12-20 |
| 6844550 | Multi-beam multi-column electron beam inspection system | Edward Yin, Alan D. Brodie, N. William Parker | 2005-01-18 |
| 6777675 | Detector optics for electron beam inspection system | N. William Parker, Edward Yin | 2004-08-17 |