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2020-05-12 |
| 10580652 |
Alternating hardmasks for tight-pitch line formation |
John C. Arnold, Anuja E. DeSilva, Nelson Felix, Chi-Chun Liu, Stuart A. Sieg |
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Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs |
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Techniques for vertical FET gate length control |
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Self aligned conductive lines with relaxed overlay |
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2017-10-10 |
