Issued Patents All Time
Showing 1–25 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11897811 | System for forming nano-laminate optical coating | Terry Bluck | 2024-02-13 |
| 11236013 | System for forming nano-laminate optical coating | Terry Bluck | 2022-02-01 |
| 9462921 | Broken wafer recovery system | Craig L. Stevens, David E. Berkstresser | 2016-10-11 |
| 9287152 | Auto-sequencing multi-directional inline processing method | Masato Toshima, Kam S. Law, David E. Berkstresser, Steve Kleinke, Craig L. Stevens | 2016-03-15 |
| 8672603 | Auto-sequencing inline processing apparatus | Masato Toshima, Kam S. Law, David E. Berkstresser, Steve Kleinke, Craig L. Stevens | 2014-03-18 |
| 8617349 | Showerhead assembly for plasma processing chamber | Kam S. Law, Masato Toshima, Linh X. Can, Robin Law | 2013-12-31 |
| 8616820 | Double dual slot load lock chamber | Shinichi Kurita | 2013-12-31 |
| 8459276 | Broken wafer recovery system | Craig L. Stevens, David E. Berkstresser | 2013-06-11 |
| 8444364 | Auto-sequencing multi-directional inline processing apparatus | Masato Toshima, Kam S. Law, David E. Berkstresser, Steve Kleinke, Craig L. Stevens | 2013-05-21 |
| 8365682 | Methods and apparatus for supporting substrates | Carl A. Sorensen, John M. White, Robin L. Tiner | 2013-02-05 |
| 8062717 | RF current return path for a large area substrate plasma reactor | Ernst Keller, Carl A. Sorensen | 2011-11-22 |
| 8033772 | Transfer chamber for vacuum processing system | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen | 2011-10-11 |
| 7976635 | Dual substrate loadlock process equipment | Shinichi Kurita, Akihiro Hosokawa | 2011-07-12 |
| 7959987 | Fuel cell conditioning layer | Tae Kyung Won, Robert Z. Bachrach, John M. White | 2011-06-14 |
| 7759158 | Scalable photovoltaic cell and solar panel manufacturing with improved wiring | Robert Z. Bachrach | 2010-07-20 |
| 7735710 | Substrate support | Shinichi Kurita, Suhail Anwar, Toshio Kiyotake, Hung T. Nguyen | 2010-06-15 |
| 7651315 | Large area substrate transferring method for aligning with horizontal actuation of lever arm | Shinichi Kurita, Yoshiaki Tanase | 2010-01-26 |
| 7641247 | End effector assembly for supporting a substrate | Takayuki Matsumoto, William N. Sterling, Billy C. Leung | 2010-01-05 |
| 7641434 | Dual substrate loadlock process equipment | Shinichi Kurita, Akihiro Hosokawa | 2010-01-05 |
| 7534301 | RF grounding of cathode in process chamber | John M. White, Robin L. Tiner, Beom Soo Park | 2009-05-19 |
| 7438175 | Linear vacuum deposition system | John M. White | 2008-10-21 |
| 7375946 | Method and apparatus for dechucking a substrate | John M. White | 2008-05-20 |
| 7316966 | Method for transferring substrates in a load lock chamber | Shinichi Kurita | 2008-01-08 |
| 7296673 | Substrate conveyor system | John M. White | 2007-11-20 |
| 7270713 | Tunable gas distribution plate assembly | John M. White, William Bagley | 2007-09-18 |