Issued Patents All Time
Showing 25 most recent of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276490 | System and method to map thickness variations of substrates in manufacturing systems | Mehdi Vaez-Iravani, Gopalakrishna B. Prabhu | 2025-04-15 |
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Prashant Aji, Eli Mor +2 more | 2025-04-01 |
| 12225808 | In-line monitoring of OLED layer thickness and dopant concentration | Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Guoheng Zhao, Dinesh Kabra +1 more | 2025-02-11 |
| 12211717 | Spatial pattern loading measurement with imaging metrology | Eric Ng, Edward W. Budiarto, Mehdi Vaez-Iravani, Venkatakaushik Voleti | 2025-01-28 |
| 12098914 | Surface roughness and emissivity determination | Eric Ng, Mehdi Vaez-Iravani | 2024-09-24 |
| 12062583 | Optical metrology models for in-line film thickness measurements | Eric Ng, Edward W. Budiarto, Sergey Starik | 2024-08-13 |
| 12002665 | Real-time detection of particulate matter during deposition chamber manufacturing | Mehdi Vaez-Iravani, Kyle Tantiwong | 2024-06-04 |
| 11927535 | Metrology for OLED manufacturing using photoluminescence spectroscopy | Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra | 2024-03-12 |
| 11908716 | Image-based in-situ process monitoring | Guoheng Zhao, Venkatakaushik Voleti, Kyle Tantiwong, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more | 2024-02-20 |
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Lei Lian, Shu-Yu Chen, Wan Hsueh Lai, Chao-Hsien Lee +3 more | 2024-02-13 |
| 11898249 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2024-02-13 |
| 11856833 | In-line monitoring of OLED layer thickness and dopant concentration | Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Guoheng Zhao, Dinesh Kabra +1 more | 2023-12-26 |
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Prashant Aji, Eli Mor +2 more | 2023-07-25 |
| 11662317 | Metrology for OLED manufacturing using photoluminescence spectroscopy | Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra | 2023-05-30 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |
| 11609183 | Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines | Avishek Ghosh, Edward W. Budiarto, Guoheng Zhao | 2023-03-21 |
| 11441992 | Method and apparatus for detection of particle size in a fluid | Mehdi Vaez-Iravani, Guoheng Zhao | 2022-09-13 |
| 11226234 | Spectrum shaping devices and techniques for optical characterization applications | Guoheng Zhao, Edward W. Budiarto | 2022-01-18 |
| 11204312 | In-situ full wafer metrology system | Ami Sade, Shay Assaf, Jacob Newman | 2021-12-21 |
| 11187654 | Imaging reflectometer | Guoheng Zhao, Mehdi Vaez-Iravani | 2021-11-30 |
| 11119051 | Particle detection for substrate processing | Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10935492 | Metrology for OLED manufacturing using photoluminescence spectroscopy | Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra | 2021-03-02 |
| 10923371 | Metrology system for substrate deformation measurement | Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong | 2021-02-16 |
| 10886155 | Optical stack deposition and on-board metrology | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Daniel Lee Diehl, Yong Cao +5 more | 2021-01-05 |
| 10845317 | Particle detection for substrate processing | Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |