Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9886764 | Image acquisition system, image acquisition method, and inspection system | Guoheng Zhao, Andrew V. Hill, Johan De Greeve, Maarten J. van der Burgt, Karel Van Gils | 2018-02-06 |
| 9679372 | Apparatus and methods for inspecting extreme ultra violet reticles | Mehran Nasser-Ghodsi, Mehdi Vaez-Iravani | 2017-06-13 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Guoheng Zhao +5 more | 2017-05-09 |
| 9619878 | Inspecting high-resolution photolithography masks | Fred E. Stanke, Ilya Toytman, David Alles, Gregg Anthony Inderhees, Stanley E. Mehdi Vaez-Iravani | 2017-04-11 |
| 8953869 | Apparatus and methods for inspecting extreme ultra violet reticles | Mehran Nasser-Ghodsi, Mehdi Vaez-Iravani | 2015-02-10 |
| 8785082 | Method and apparatus for inspecting a reflective lithographic mask blank and improving mask quality | Yalin Xiong | 2014-07-22 |
| 8711346 | Inspection systems and methods for detecting defects on extreme ultraviolet mask blanks | — | 2014-04-29 |
| 7869023 | System for detecting anomalies and/or features of a surface | Guoheng Zhao, Mehdi Vaez-Iravani | 2011-01-11 |
| 7564545 | Inspection methods and systems for lithographic masks | — | 2009-07-21 |
| 7319229 | Illumination apparatus and methods | Mehdi Vaez-Iravani, Guoheng Zhao | 2008-01-15 |
| 7303842 | Systems and methods for modifying a reticle's optical properties | Sterling Watson, Ady Levy, Chris Mack, Zain Saidin, Larry S. Zurbrick | 2007-12-04 |
| 7300725 | Method for determining and correcting reticle variations | Sterling Watson, Ady Levy, Chris Mack, Zain Saidin | 2007-11-27 |
| 7300729 | Method for monitoring a reticle | Sterling Watson, Ady Levy, Chris Mack, Zain Saidin | 2007-11-27 |
| 7297453 | Systems and methods for mitigating variances on a patterned wafer using a prediction model | Sterling Watson, Ady Levy, Chris Mack, Zain Saidin | 2007-11-20 |
| 7280199 | System for detecting anomalies and/or features of a surface | Guoheng Zhao, Mehdi Vaez-Iravani | 2007-10-09 |
| 7218392 | Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination | Steve Biellak, Mehdi Vaez-Iravani | 2007-05-15 |
| 7119897 | Sample inspection system | Mehdi Vaez-Iravani, Guoheng Zhao | 2006-10-10 |
| 7088443 | System for detecting anomalies and/or features of a surface | Mehdi Vaez-Iravani, Guoheng Zhao | 2006-08-08 |
| 7084967 | Scanning system for inspecting anomalies on surfaces | Mehrdad Nikoonahad | 2006-08-01 |
| 7079238 | Sample inspection system | Mehdi Vaez-Iravani, Guoheng Zhao | 2006-07-18 |
| 7064821 | Sample inspection system | Mehdi Vaez-Iravani, Guoheng Zhao | 2006-06-20 |
| 6956644 | Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination | Steve Biellak, Mehdi Vaez-Iravani | 2005-10-18 |
| 6891611 | Sample inspection system | Mehdi Vaez-Iravani, Guoheng Zhao | 2005-05-10 |
| 6674522 | Efficient phase defect detection system and method | Matthias C. Krantz, Mark J. Wihl | 2004-01-06 |
| 6657715 | Sample inspection system | Mehdi Vaez-Iravani, Guoheng Zhao | 2003-12-02 |