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Vibration isolation system and lithographic apparatus |
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Lithographic apparatus, object positioning system and device manufacturing method |
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2019-01-29 |
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Lithographic apparatus |
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System for positioning an object in lithography |
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Stage system and a lithographic apparatus |
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| 9192271 |
Suction unit and autonomous vacuum cleaner |
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Actuator arrangement for active vibration isolation comprising an inertial reference mass |
Michael Johannes Vervoordeldonk, Theo Anges Maria Ruijl, Johannes Müller |
2014-12-23 |
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Device comprising at least a body and a bumper, and robot cleaner comprising such a device |
Ronald Maarten Schneider, Jan Willem Bruggers, Jeroen Dekkers |
2013-06-11 |
| 8091694 |
Actuator arrangement for active vibration isolation comprising an inertial reference mass |
Michael Johannes Vervoordeldonk, Theo Anjes Maria Ruijl, Johannes Müller |
2012-01-10 |
