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Methods and apparatus for measuring a property of a substrate |
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2024-05-07 |
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Method for controlling a manufacturing process and associated apparatuses |
Steven E. Steen, Pieter Gerardus Jacobus SMORENBERG, Khalid ELBATTAY |
2023-09-26 |
| 11714357 |
Method to predict yield of a device manufacturing process |
Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more |
2023-08-01 |
| RE49460 |
Inspection method and apparatus and lithographic processing cell |
Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben |
2023-03-14 |
| RE49199 |
Inspection method and apparatus and lithographic processing cell |
Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben |
2022-09-06 |
| 11170072 |
Method and apparatus for inspection and metrology |
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2021-11-09 |
| 11086229 |
Method to predict yield of a device manufacturing process |
Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more |
2021-08-10 |
| 11036146 |
Method and apparatus to reduce effects of nonlinear behavior |
Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Peter Hanzen Wardenier, Erik Weber Jensen, Hakki Ergün Cekli |
2021-06-15 |
| 10996176 |
Methods and apparatus for measuring a property of a substrate |
Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more |
2021-05-04 |
| 10996573 |
Method and system for increasing accuracy of pattern positioning |
David Deckers, Peter Hanzen Wardenier |
2021-05-04 |
| 10915689 |
Method and apparatus to correct for patterning process error |
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2021-02-09 |
| 10816907 |
Method for determining an optimized set of measurement locations for measurement of a parameter of a lithographic process, metrology system and computer program products for implementing such methods |
Christiaan Theodoor De Ruiter |
2020-10-27 |
| 10746668 |
Methods and apparatus for measuring a property of a substrate |
Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more |
2020-08-18 |
| 10719011 |
Method and apparatus to correct for patterning process error |
Daan Maurits Slotboom, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier |
2020-07-21 |
| 10691863 |
Method and apparatus to correct for patterning process error |
Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen |
2020-06-23 |
| 10317191 |
Methods and apparatus for measuring a property of a substrate |
Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more |
2019-06-11 |
| 9594029 |
Methods and apparatus for measuring a property of a substrate |
Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more |
2017-03-14 |
| 8887107 |
Inspection method and apparatus and lithographic processing cell |
Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons, Nicole Schoumans, Michael Kubis, Paul Cornelis Hubertus Aben |
2014-11-11 |
| 7927090 |
Imprint lithographic apparatus, device manufacturing method and device manufactured thereby |
— |
2011-04-19 |
| 7349071 |
Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method |
Henricus Wilhelmus Maria Van Buel, Marcus Theodoor Wilhelmus Van Der Heijden |
2008-03-25 |
| 7342642 |
Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method |
Henricus Wilhelmus Maria Van Buel, Markus Theodoor Wilhelmus Van Der Heijden |
2008-03-11 |
| 7253077 |
Substrate, method of preparing a substrate, method of measurement, lithographic apparatus, device manufacturing method and device manufactured thereby, and machine-readable storage medium |
Gerardus Johannes Joseph Keijsers |
2007-08-07 |