Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11855318 | Fuel battery cell, fuel battery system, leak detection method | Munenori Degawa, Noriyuki Sakuma, Yoshitaka Sasago, Aritoshi Sugimoto, Takashi Tsutsumi | 2023-12-26 |
| 11417892 | Fuel cell | Noriyuki Sakuma, Yoshitaka Sasago, Aritoshi Sugimoto, Seiichi Watanabe | 2022-08-16 |
| 8698249 | CMOS semiconductor device and method for manufacturing the same | Takahisa Eimori | 2014-04-15 |
| 8466053 | Method of manufacturing semiconductor device, and semiconductor device | Takeo Matsuki | 2013-06-18 |
| 8404603 | Method of manufacturing semiconductor device and substrate processing system | Arito OGAWA, Sadayoshi Horii, Taketoshi Sato, Hideharu Itatani, Osamu Tonomura | 2013-03-26 |
| 8288221 | Method of manufacturing semiconductor device and semiconductor device | Takahisa Eimori | 2012-10-16 |
| 7968396 | Semiconductor device and manufacturing method of the semiconductor device | Yukimune Watanabe, Shinji Migita | 2011-06-28 |
| 7947560 | Method of nickel disilicide formation and method of nickel disilicate source/drain formation | Yukimune Watanabe, Shinji Migita | 2011-05-24 |
| 7863127 | Manufacturing method of semiconductor device | Tetsu Morooka | 2011-01-04 |
| 7671426 | Metal insulator semiconductor transistor using a gate insulator including a high dielectric constant film | Akira Toriumi | 2010-03-02 |
| 7645655 | Semiconductor device and manufacturing method of the semiconductor device | Yukimune Watanabe, Shinji Migita | 2010-01-12 |
| 7507632 | Semiconductor device and manufacturing method thereof | Akira Toriumi | 2009-03-24 |
| 6967109 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Ryoji Nishio, Kazue Takahashi | 2005-11-22 |
| 6835665 | Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method | Ken Yoshioka, Ryoji Nishio, Tatehito Usui | 2004-12-28 |
| 6759253 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tatehito Usui, Tetsuo Ono, Ryoji Nishio, Kazue Takahashi | 2004-07-06 |
| 6656752 | Ion current density measuring method and instrument, and semiconductor device manufacturing method | Tatehito Usui, Masato Ikegawa, Kazuo Nojiri, Kazuyuki Tsunokuni, Tetsuo Ono | 2003-12-02 |
| 6462411 | Semiconductor wafer processing apparatus for transferring a wafer mount | Tomoji Watanabe, Toshiyuki Uchino, Norio Suzuki, Yoshihiko Sakurai, Toshiya Uenishi +3 more | 2002-10-08 |
| 5242539 | Plasma treatment method and apparatus | Takao Kumihashi, Kazunori Tsujimoto, Shinichi Tachi, Masafumi Kanetomo, Junichi Kobayashi +1 more | 1993-09-07 |