Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404269 | Single crystal substrate with undulating ridges and silicon carbide substrate | Noriyasu Kawana | 2022-08-02 |
| 11142821 | Method for producing single crystal substrate having a plurality of grooves using a pair of masks | Noriyasu Kawana | 2021-10-12 |
| 9882010 | Silicon carbide substrate and method for producing silicon carbide substrate | — | 2018-01-30 |
| 9758902 | Method for producing 3C-SiC epitaxial layer, 3C-SiC epitaxial substrate, and semiconductor device | Noriyasu Kawana | 2017-09-12 |
| 9732439 | Method of forming a laminate of epitaxially grown cubic silicon carbide layers, and method of forming a substrate-attached laminate of epitaxially grown cubic silicon carbide layers | — | 2017-08-15 |
| 9536954 | Substrate with silicon carbide film, semiconductor device, and method for producing substrate with silicon carbide film | — | 2017-01-03 |
| 9362368 | Substrate with silicon carbide film, method for producing substrate with silicon carbide film, and semiconductor device | — | 2016-06-07 |
| 9064802 | Method of manufacturing semiconductor device and semiconductor device having oxide film crystallized by a thermal treatment | — | 2015-06-23 |
| 8986464 | Semiconductor substrate and method for producing semiconductor substrate | — | 2015-03-24 |
| 8847236 | Semiconductor substrate and semiconductor substrate manufacturing method | — | 2014-09-30 |
| 7968396 | Semiconductor device and manufacturing method of the semiconductor device | Shinji Migita, Nobuyuki Mise | 2011-06-28 |
| 7947560 | Method of nickel disilicide formation and method of nickel disilicate source/drain formation | Nobuyuki Mise, Shinji Migita | 2011-05-24 |
| 7713884 | Method of manufacturing semiconductor device that includes forming metal oxide film on semiconductor wafer | Hiromi Ito, Yuuichi Kamimuta, Shinji Migita | 2010-05-11 |
| 7645655 | Semiconductor device and manufacturing method of the semiconductor device | Shinji Migita, Nobuyuki Mise | 2010-01-12 |