Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861674 | Compensated location specific processing apparatus and method | Matthew C. Gwinn, Martin D. Tabat, Kenneth Regan, Allen J. Leith | 2020-12-08 |
| 10497540 | Compensated location specific processing apparatus and method | Matthew C. Gwinn, Martin D. Tabat, Kenneth Regan, Allen J. Leith | 2019-12-03 |
| 9735019 | Process gas enhancement for beam treatment of a substrate | Noel Russell, Matthew C. Gwinn, Allen J. Leith | 2017-08-15 |
| 9103031 | Method and system for growing a thin film using a gas cluster ion beam | John Hautala, Yan Shao, Brian S. Freer | 2015-08-11 |
| 8981322 | Multiple nozzle gas cluster ion beam system | Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Avrum Freytsis | 2015-03-17 |
| 8803110 | Methods for beam current modulation by ion source parameter modulation | Edward C. Eisner, William F. DiVergilio, Daniel R. Tieger | 2014-08-12 |
| 8691700 | Gas cluster ion beam etch profile control using beam divergence | John Hautala | 2014-04-08 |
| 8338806 | Gas cluster ion beam system with rapid gas switching apparatus | Robert K. Becker, Christopher T. Reddy, Noel Russell | 2012-12-25 |
| 8304033 | Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles | Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Avrum Freytsis | 2012-11-06 |
| 8193513 | Hybrid ion source/multimode ion source | William F. DiVergilio, Daniel R. Tieger | 2012-06-05 |
| 8173980 | Gas cluster ion beam system with cleaning apparatus | Andrej Mitrovic | 2012-05-08 |
| 8097860 | Multiple nozzle gas cluster ion beam processing system and method of operating | Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Avrum Freytsis | 2012-01-17 |
| 8089052 | Ion source with adjustable aperture | Daniel R. Tieger, William F. DiVergilio, Edward C. Eisner | 2012-01-03 |
| 7750320 | System and method for two-dimensional beam scan across a workpiece of an ion implanter | Joseph Ferrara, Bo H. Vanderberg | 2010-07-06 |
| 7701230 | Method and system for ion beam profiling | John Zheng Ye, Michael Cristoforo, Yongzhang Huang, Bo H. Vanderberg | 2010-04-20 |
| 7598495 | Methods and systems for trapping ion beam particles and focusing an ion beam | Peter L. Kellerman, Victor M. Benveniste, Alexander S. Perel, Brian S. Freer | 2009-10-06 |
| 7589333 | Methods for rapidly switching off an ion beam | Edward C. Eisner, William F. DiVergilio, Daniel R. Tieger | 2009-09-15 |
| 7557363 | Closed loop dose control for ion implantation | Yongzhang Huang, Brian S. Freer, John Zheng Ye, Christopher Godfrey, Patrick Splinter | 2009-07-07 |
| 7423277 | Ion beam monitoring in an ion implanter using an imaging device | Alexander S. Perel, Phil J. Ring, Ronald A. Capodilupo | 2008-09-09 |
| 7375355 | Ribbon beam ion implanter cluster tool | Joseph Ferrara, Patrick Splinter, Victor M. Benveniste | 2008-05-20 |
| 7358508 | Ion implanter with contaminant collecting surface | Philip J. Ring | 2008-04-15 |
| 6992310 | Scanning systems and methods for providing ions from an ion beam to a workpiece | Joseph Ferrara, Bo H. Vanderberg | 2006-01-31 |
| 6992308 | Modulating ion beam current | Andrew M. Ray | 2006-01-31 |
| 6953942 | Ion beam utilization during scanned ion implantation | Andrew M. Ray | 2005-10-11 |
| 6847847 | Retina implant assembly and methods for manufacturing the same | Wilfried Nisch, Alfred Stett, Markus Schubert, Heinz-Gerhard Graf, Hugo Hammerle +3 more | 2005-01-25 |