Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341048 | Porous plug for electrostatic chuck gas delivery | Alexander SULYMAN, Xue Yang Chang, Anwar Husain, Timothy Joseph Franklin | 2025-06-24 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph Behnke, Xue Yang Chang, Anwar Husain, Alexander SULYMAN, Timothy Joseph Franklin +1 more | 2025-01-14 |
| 11920234 | Yttrium oxide based coating composition | Vahid Firouzdor, Christopher Laurent Beaudry, Hyun-Ho Doh, Joseph Behnke | 2024-03-05 |
| 11905583 | Gas quench for diffusion bonding | Joseph Behnke, Sumit Agarwal | 2024-02-20 |
| 11819948 | Methods to fabricate chamber component holes using laser drilling | Sumit Agarwal, Timothy Joseph Franklin | 2023-11-21 |
| 11661650 | Yttrium oxide based coating composition | Vahid Firouzdor, Christopher Laurent Beaudry, Hyun-Ho Doh, Joseph Behnke | 2023-05-30 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Morgan Evans, Ernest E. Allen, Tyler Rockwell, Richard J. Hertel, Christopher Campbell | 2019-04-30 |
| 9101954 | Geometries and patterns for surface texturing to increase deposition retention | Jianqi Wang, William M. Lu, Yukari Nishimura, Sio On Lo, Rajan Balesan | 2015-08-11 |
| 9001489 | Electrostatic chuck AlN dielectric repair | Wendell Glenn Boyd, Jr., William M. Lu, Rajan Balesan | 2015-04-07 |
| 8714166 | Method and apparatus for showerhead cleaning | Jiansheng Wang, David Do, Satyanarayana Adamala, Ronald Trahan | 2014-05-06 |
| 8398779 | Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates | Liyuan Bao, Anbei Jiang, Sio On Lo, Yukari Nishimura, Samantha Tan | 2013-03-19 |
| 8372211 | Method and apparatus for showerhead cleaning | Jiansheng Wang, David Do, Satyanarayana Adamala, Ronald Trahan | 2013-02-12 |
| 7762114 | Flow-formed chamber component having a textured surface | Stephen Abney, Anthony Vesci, Marc Schweitzer, Scott Dickerson, Jennifer Tiller | 2010-07-27 |
| 6792605 | Method and apparatus for providing web based services using an XML Runtime model to store state session data | Andrew F. Roberts, Jonathan W. Booth, Michael R. Burati, Thomas E. Beauvais, John T. Serfass | 2004-09-14 |