Issued Patents All Time
Showing 25 most recent of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270748 | Method and apparatus for measuring particles | Amir A. Yasseri, Girish M. HUNDI, John Michael Kerns, Duane Outka, Cliff La Croix | 2025-04-08 |
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, Pankaj HAZARIKA, Satish SRINIVASAN, Nash W. ANDERSON +5 more | 2025-03-11 |
| 12198902 | Laminated aerosol deposition coating for aluminum components for plasma processing chambers | Lin Xu, Satish SRINIVASAN, David Joseph WETZEL | 2025-01-14 |
| 12129569 | Method for conditioning semiconductor processing chamber components | Lin Xu, David Joseph WETZEL, Hong Shih, Satish SRINIVASAN, Yuanping Song +3 more | 2024-10-29 |
| 12087561 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2024-09-10 |
| 12072318 | Chamber component cleanliness measurement system | Amir A. Yasseri, Duane Outka, Armen Avoyan, Kennet Baylon, Girish M. HUNDI +1 more | 2024-08-27 |
| 12064795 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more | 2024-08-20 |
| 11764086 | Wafer transport assembly with integrated buffers | David Trussell, Christopher Pena, Michael C. Kellogg, Klay Kunkel, Richard H. Gould | 2023-09-19 |
| 11710623 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2023-07-25 |
| 11662237 | MEMS coriolis gas flow controller | Iqbal Shareef, Dennis R. Smith | 2023-05-30 |
| 11393705 | Wafer transport assembly with integrated buffers | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2022-07-19 |
| 11124659 | Method to selectively pattern a surface for plasma resistant coat applications | Amir A. Yasseri, Duane Outka, Hong Shih | 2021-09-21 |
| 11112773 | Systems for removing and replacing consumable parts from a semiconductor process module in situ | David Trussell, Alan J. Miller, Alex Paterson | 2021-09-07 |
| 11087961 | Quartz component with protective coating | Lin Xu, Robin KOSHY, Satish SRINIVASAN, David Joseph WETZEL | 2021-08-10 |
| 11031215 | Vacuum pump protection against deposition byproduct buildup | John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more | 2021-06-08 |
| 10967407 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more | 2021-04-06 |
| 10964514 | Electrode for plasma processing chamber | Evan E. Patton | 2021-03-30 |
| 10914003 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, Christopher Pena | 2021-02-09 |
| 10790174 | Wafer transport assembly with integrated buffers | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2020-09-29 |
| 10615009 | System implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, Vahid Vahedi, Richard A. Gottscho | 2020-04-07 |
| 10557197 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, Christopher Pena | 2020-02-11 |
| 10304707 | Load lock interface and integrated post-processing module | David Trussell, Richard H. Gould | 2019-05-28 |
| 10014196 | Wafer transport assembly with integrated buffers | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-07-03 |
| 9972478 | Method and process of implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, Vahid Vahedi, Richard A. Gottscho | 2018-05-15 |
| 9947558 | Method for conditioning silicon part | Lin Xu, Hong Shih, Robin KOSHY, Satish SRINIVASAN | 2018-04-17 |