| 8298962 |
Device made of single-crystal silicon |
Arnd Kaelberer, Roland Scheuerer, Heribert Weber |
2012-10-30 |
| 7834452 |
Device made of single-crystal silicon |
Arnd Kaelberer, Roland Scheuerer, Heribert Weber |
2010-11-16 |
| 7273764 |
Sensor with at least one micromechanical structure, and method for producing it |
Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Franz Laemer +2 more |
2007-09-25 |
| 6936902 |
Sensor with at least one micromechanical structure and method for production thereof |
Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Franz Laemer +2 more |
2005-08-30 |
| 6723250 |
Method of producing structured wafers |
Joerg Schaefer, Peter Linke, Albrecht Schwille |
2004-04-20 |
| 6465854 |
Micromechanical component |
Horst Muenzel, Eckhard Graf |
2002-10-15 |
| 6462392 |
Micromechanical cap structure and the respective manufacturing method |
Stefan Pinter, Harald Emmerich, Hans-Peter Trah |
2002-10-08 |
| 6360605 |
Micromechanical device |
Stefan Pinter, Martin Schoefthaler, Matthias Illing, Ralf Schellin, Michael Fehrenbach +2 more |
2002-03-26 |
| 6271471 |
Housing for electronic component, and method of producing the same |
Manfred Leiter, Kurt Weiblen, Bernhard Lucas, Frank Schatz, Thomas Beez +6 more |
2001-08-07 |
| 6204086 |
Method for manufacturing semiconductor components having micromechanical structures |
Joerg Muchow |
2001-03-20 |
| 6106735 |
Wafer stack and method of producing sensors |
Jurgen Kurle, Kurt Weiblen, Stefan Pinter, Horst Muenzel, Dietrich Schubert +2 more |
2000-08-22 |
| 5721377 |
Angular velocity sensor with built-in limit stops |
Juergen Kurle, Kurt Weiblen, Horst Muenzel, Klaus Heyers, Markus Lutz |
1998-02-24 |
| 5705745 |
Mass flow sensor |
Christoph Treutler, Detlef Gruen, Horst Muenzel, Steffen Schmidt, Andreas Lock |
1998-01-06 |
| 5683947 |
Method for producing a component according to the anodic bonding method and component |
— |
1997-11-04 |
| 5629538 |
Semiconductor sensor having a protective layer |
Uwe Lipphardt, Guenther Findler, Horst Muenzel |
1997-05-13 |
| 5461917 |
Acceleration sensor |
Jiri Marek, Dietrich Schubert, Horst Muenzel, Michael Offenberg, Martin Willmann |
1995-10-31 |
| 5369060 |
Method for dicing composite wafers |
Juergen Kurle, Peter Eiberger |
1994-11-29 |
| 5355569 |
Method of making sensor |
Jiri Marek, Guenther Findler, Michael Offenberg, Martin Willmann |
1994-10-18 |
| 5273939 |
Method of assembling micromechanical sensors |
Rolf Becker, Klaus Jaeckel, Jiri Marek, Frank Bantien, Kurt Weiblen +1 more |
1993-12-28 |
