Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Fred Alokozai +3 more | 2024-05-07 |
| 11967488 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Jereld Lee Winkler, Xichong Chen | 2024-04-23 |
| 11501973 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Petri Raisanen, Mark Olstad, Jose Alexandro Romero, Ward Johnson, Peijun Chen | 2022-11-15 |
| 11306395 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, Robert Brennan Milligan, William George Petro, Eric Wang, Fred Alokozai +3 more | 2022-04-19 |
| 11056567 | Method of forming a doped metal carbide film on a substrate and related semiconductor device structures | Peng-Fu Hsu, Petri Raisanen, Moataz Bellah Mousa, Ward Johnson, Xichong Chen | 2021-07-06 |
| 10872771 | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures | Petri Raisanen, Mark Olstad, Jose Alexandro Romero, Ward Johnson, Peijun Chen | 2020-12-22 |
| 9631272 | Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds | Steven Marcus, Suvi Haukka, Wei Li | 2017-04-25 |
| 9583348 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2017-02-28 |
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Robert Brennan Milligan, Steven Marcus | 2016-10-11 |
| 9236247 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2016-01-12 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Jereld Lee Winkler, Xichong Chen | 2016-01-05 |
| 8841182 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2014-09-23 |
| 8329569 | Deposition of ruthenium or ruthenium dioxide | — | 2012-12-11 |
| 7666474 | Plasma-enhanced pulsed deposition of metal carbide films | Steven Marcus, Glen Wilk, Brennan Milligan | 2010-02-23 |
| 7205240 | HDP-CVD multistep gapfill process | M. Ziaul Karim, Bikram Kapoor, Anchuan Wang, Katsunari Ozeki, Manoj Vellaikal +1 more | 2007-04-17 |
| 7064077 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Zhengquan Tan, Zhuang Li, Michael Kwan, Bruno Geoffrion +1 more | 2006-06-20 |
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Zhengquan Tan, Zhuang Li, Michael Kwan, Bruno Geoffrion +1 more | 2004-11-02 |
| 5776615 | Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride, carbide and carbonitride | Ming-Show Wong, Yip-Wah Chung, William D. Sproul, Xi Chu, Scott A. Barnett | 1998-07-07 |
| 5725913 | Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride carbide and carbonitride | Ming-Show Wong, Yin-Wah Chung, William D. Sproul, Xi Chu, Scott A. Barnett | 1998-03-10 |