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Sensor array for measuring plasma characteristics in plasma processing environments |
Leonard Mahoney, Carl W. Almgren, Gregory A. Roche, William W. Saylor, Hendrik Walde |
2013-10-01 |
| 6902646 |
Sensor array for measuring plasma characteristics in plasma processing environments |
Leonard Mahoney, Carl W. Almgren, Gregory A. Roche, William W. Saylor, Hendrik Walde |
2005-06-07 |
| 5942089 |
Method for sputtering compounds on a substrate |
Michael Evans Graham |
1999-08-24 |
| 5789071 |
Multilayer oxide coatings |
Scott A. Barnett, Anthony Lefkow, Ming-Show Wong, Phillip Yashar |
1998-08-04 |
| 5783295 |
Polycrystalline supperlattice coated substrate and method/apparatus for making same |
Scott A. Barnett, Ming-Show Wong, Xi Chu |
1998-07-21 |
| 5776615 |
Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride, carbide and carbonitride |
Ming-Show Wong, Dong Li, Yip-Wah Chung, Xi Chu, Scott A. Barnett |
1998-07-07 |
| 5725913 |
Superhard composite materials including compounds of carbon and nitrogen deposited on metal and metal nitride carbide and carbonitride |
Ming-Show Wong, Dong Li, Yin-Wah Chung, Xi Chu, Scott A. Barnett |
1998-03-10 |
| 4670172 |
Process and kit for working metals |
Roger K. Nibert |
1987-06-02 |
| 4608243 |
High hardness hafnium nitride |
— |
1986-08-26 |
| 4428811 |
Rapid rate reactive sputtering of a group IVb metal |
James R. Tomashek |
1984-01-31 |
| 4428812 |
Rapid rate reactive sputtering of metallic compounds |
— |
1984-01-31 |
| 4388159 |
Surface preparation of aluminum articles |
Kostas F. Dockus |
1983-06-14 |
