Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8545669 | Sensor array for measuring plasma characteristics in plasma processing environments | Carl W. Almgren, Gregory A. Roche, William W. Saylor, William D. Sproul, Hendrik Walde | 2013-10-01 |
| 7853364 | Adaptive controller for ion source | James D. Deakins, Dennis John Hansen, Tolga Erguder, David M. Burtner | 2010-12-14 |
| 7192505 | Wafer probe for measuring plasma and surface characteristics in plasma processing environments | Gregory A. Roche, Daniel Carter, Steven Roberts | 2007-03-20 |
| 6902646 | Sensor array for measuring plasma characteristics in plasma processing environments | Carl W. Almgren, Gregory A. Roche, William W. Saylor, William D. Sproul, Hendrik Walde | 2005-06-07 |
| 6830650 | Wafer probe for measuring plasma and surface characteristics in plasma processing environments | Gregory A. Roche, Daniel Carter, Steven Roberts | 2004-12-14 |
| 6504294 | Method and apparatus for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source | David Ward Brown, Rudolph Hugo Petrmichl | 2003-01-07 |
| 6432260 | Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereof | Gregory A. Roche, Daniel Carter | 2002-08-13 |
| 6086796 | Diamond-like carbon over-coats for optical recording media devices and method thereof | David Ward Brown, Edward G. Thear, Rudolph Hugo Petrmichl | 2000-07-11 |
| 6086962 | Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source | David Ward Brown, Rudolph Hugo Petrmichl | 2000-07-11 |
| 5973447 | Gridless ion source for the vacuum processing of materials | Brian K. Daniels, Rudolph Hugo Petrmichl, Florian Joseph Fodor, Ray Hays Venable, III | 1999-10-26 |
| 5888593 | Ion beam process for deposition of highly wear-resistant optical coatings | Rudolph Hugo Petrmichl, Ray Hays Venable III, Norman D. Galvin, Bradley J. Knapp, Fred M. Kimock | 1999-03-30 |
| 5521351 | Method and apparatus for plasma surface treatment of the interior of hollow forms | — | 1996-05-28 |
| 5411914 | III-V based integrated circuits having low temperature growth buffer or passivation layers | Chang-Lee Chen, Michael James Manfra, Frank W. Smith, Arthur R. Calawa | 1995-05-02 |