| 12406826 |
Charged particle beam device and sample observation method |
Natsuki Tsuno, Yasuhiro Shirasaki, Yohei Nakamura, Satoshi Takada |
2025-09-02 |
| 12191111 |
Charged particle beam system and method for determining observation conditions in charged particle beam device |
Fumiya Ishizaka, Makoto Suzuki |
2025-01-07 |
| 12181513 |
Inspection method |
Shota Mitsugi, Yohei Nakamura, Junichi FUSE, Satoshi Takada, Natsuki Tsuno |
2024-12-31 |
| 11869745 |
Charged particle beam device |
Minami Shouji, Natsuki Tsuno, Hiroya Ohta |
2024-01-09 |
| 11610756 |
Charged particle beam apparatus and control method |
Kaori Bizen, Ryota Watanabe, Yuzuru Mizuhara |
2023-03-21 |
| 11456150 |
Charged particle beam device |
Kaori Bizen, Yuzuru Mizuhara, Minoru Yamazaki, Noritsugu Takahashi |
2022-09-27 |
| 11282671 |
Charged-particle beam apparatus |
Uki Ikeda, Makoto Sakakibara, Makoto Suzuki |
2022-03-22 |
| 11211224 |
Charged particle beam apparatus |
Nobuhiro Okai, Tomoyasu Shojo, Naomasa Suzuki, Muneyuki Fukuda |
2021-12-28 |
| 11211226 |
Pattern cross-sectional shape estimation system and program |
Toshiyuki Yokosuka, Hirohiko Kitsuki, Makoto Suzuki, Yusuke Abe, Kenji Yasui +2 more |
2021-12-28 |
| 11164720 |
Scanning electron microscope and calculation method for three-dimensional structure depth |
Kenji Yasui, Mayuka Osaki, Makoto Suzuki, Hirohiko Kitsuki, Toshiyuki Yokosuka +1 more |
2021-11-02 |
| 11011348 |
Scanning electron microscope and sample observation method using scanning electron microscope |
Natsuki Tsuno, Takafumi Miwa, Makoto Sakakibara, Toshiyuki Yokosuka, Hideyuki Kazumi |
2021-05-18 |
| 10825649 |
Electron beam device |
Yasunari Sohda, Makoto Sakakibara |
2020-11-03 |
| 10338367 |
Scanning microscope with controlled variable measurement parameters |
Ryoko Araki, Hyejin Kim |
2019-07-02 |
| 10262830 |
Scanning electron microscope and electron trajectory adjustment method therefor |
Hideo Morishita, Michio Hatano, Hiroya Ohta |
2019-04-16 |
| 10217604 |
Charged particle beam apparatus |
Makoto Sakakibara, Hajime Kawano, Makoto Suzuki, Yuji Kasai, Yoshinori Momonoi |
2019-02-26 |
| 10014160 |
Scanning electron microscope and method for controlling same |
Kaori Shirahata, Makoto Sakakibara, Yasunari Sohda, Hajime Kawano, Hideyuki Kazumi |
2018-07-03 |
| 9966225 |
Charged particle beam device, simulation method, and simulation device |
Makoto Sakakibara, Hiroya Ohta, Junichi Tanaka |
2018-05-08 |
| 9520266 |
Pattern critical dimension measurement equipment and method for measuring pattern critical dimension |
Kaori Shirahata, Yasunari Sohda, Makoto Sakakibara, Hajime Kawano, Hideyuki Kazumi |
2016-12-13 |
| 9336984 |
Charged particle beam device and measuring method using the same |
Hajime Kawano, Hideyuki Kazumi |
2016-05-10 |