Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8110799 | Confocal secondary electron imaging | — | 2012-02-07 |
| 7816655 | Reflective electron patterning device and method of using same | Harald F. Hess, Marian Mankos | 2010-10-19 |
| 7660687 | Robust measurement of parameters | Indranil De, Mark A. McCord | 2010-02-09 |
| 7656170 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, Brian C. Leslie, Akella V. S. Satya, Robert Long, David J. Walker | 2010-02-02 |
| 7514681 | Electrical process monitoring using mirror-mode electron microscopy | Paul Frank Marella, Mark A. McCord, Marian Mankos | 2009-04-07 |
| 7397941 | Method and apparatus for electron beam inspection of repeated patterns | — | 2008-07-08 |
| 7391033 | Skew-oriented multiple electron beam apparatus and method | — | 2008-06-24 |
| 7361941 | Calibration standards and methods | Gian Francesco Lorusso, Christopher F. Bevis, Luca Grella, Ian Smith | 2008-04-22 |
| 7351968 | Multi-pixel electron emission die-to-die inspection | — | 2008-04-01 |
| 7315022 | High-speed electron beam inspection | Mark A. McCord, Mehdi Vaez-Iravani, Liqun Han, Kirk J. Bertsche | 2008-01-01 |
| 7184137 | Aerial reticle inspection with particle beam conversion | — | 2007-02-27 |
| 7171038 | Method and apparatus for inspecting a substrate | Kirk J. Bertsche, Mark A. McCord, Stuart L. Friedman | 2007-01-30 |
| 7135675 | Multi-pixel and multi-column electron emission inspector | — | 2006-11-14 |
| 7098456 | Method and apparatus for accurate e-beam metrology | Gian Francesco Lorusso, Paola De Cecco, Luca Grella, David Goodstein, Chris Bevis | 2006-08-29 |
| 7078689 | Integrated electron beam and contaminant removal system | Mehran Nasser-Ghodsi | 2006-07-18 |
| 7019292 | E-beam detection of defective contacts/vias with flooding and energy filter | Frank Fan, Kirk J. Bertsche, Luca Grella | 2006-03-28 |
| 7012439 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, Brian C. Leslie, Akella V. S. Satya, Robert Long, David J. Walker | 2006-03-14 |
| 7009177 | Apparatus and method for tilted particle-beam illumination | Marian Mankos, Luca Grella | 2006-03-07 |
| 6984822 | Apparatus and method for secondary electron emission microscope | David J. Walker, Fred Babian, Travis Wolfe | 2006-01-10 |
| 6979824 | Filtered e-beam inspection and review | Luca Grella | 2005-12-27 |
| 6979819 | Photoelectron emission microscope for wafer and reticle inspection | Matthew S. Marcus | 2005-12-27 |
| 6921672 | Test structures and methods for inspection of semiconductor integrated circuits | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Neil Richardson, Kurt H. Weiner +2 more | 2005-07-26 |
| 6903338 | Method and apparatus for reducing substrate edge effects in electron lenses | Marian Mankos | 2005-06-07 |
| 6897444 | Multi-pixel electron emission die-to-die inspection | — | 2005-05-24 |
| 6885000 | Method and apparatus to correct for stage motion in E-beam inspection | — | 2005-04-26 |