Issued Patents All Time
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872942 | High-speed inspection of flat substrates with underlying visible topology | — | 2005-03-29 |
| 6870172 | Maskless reflection electron beam projection lithography | Marian Mankos, Harald F. Hess, Kirk J. Bertsche | 2005-03-22 |
| 6867606 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, Brian C. Leslie, Akella V. S. Satya, Robert Long, David J. Walker | 2005-03-15 |
| 6858843 | Immersion objective lens for e-beam inspection | Marian Mankos | 2005-02-22 |
| 6841776 | Method and apparatus for high-speed inspection and review | — | 2005-01-11 |
| 6812461 | Photocathode source for e-beam inspection or review | Marian Mankos | 2004-11-02 |
| 6803571 | Method and apparatus for dual-energy e-beam inspector | Marian Mankos | 2004-10-12 |
| 6803572 | Apparatus and methods for secondary electron emission microscope with dual beam | Lee H. Veneklasen | 2004-10-12 |
| 6797955 | Filtered e-beam inspection and review | Luca Grella, Gabor Toth | 2004-09-28 |
| 6771806 | Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices | Akella V. S. Satya, Bin-Ming Benjamin Tsai, David J. Walker | 2004-08-03 |
| 6713759 | Apparatus and method for secondary electron emission microscope | David J. Walker, Fred Babian, Travis Wolfe | 2004-03-30 |
| 6690010 | Chemical analysis of defects using electron appearance spectroscopy | — | 2004-02-10 |
| 6636064 | Dual probe test structures for semiconductor integrated circuits | Akella V. S. Satya, Neil Richardson, Kurt H. Weiner, David J. Walker | 2003-10-21 |
| 6633174 | Stepper type test structures and methods for inspection of semiconductor integrated circuits | Akella V. S. Satya, Neil Richardson, Gustavo A. Pinto, David J. Walker | 2003-10-14 |
| 6610980 | Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams | Lee H. Veneklasen, Matthew S. Marcus | 2003-08-26 |
| 6586733 | Apparatus and methods for secondary electron emission microscope with dual beam | Lee H. Veneklasen | 2003-07-01 |
| 6570154 | Scanning electron beam microscope | Douglas K. Masnaghetti, Stefano E. Concina, Stanley Sun, Waiman Ng | 2003-05-27 |
| 6566885 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, Brian C. Leslie, Akella V. S. Satya, Robert Long, David J. Walker | 2003-05-20 |
| 6528818 | Test structures and methods for inspection of semiconductor integrated circuits | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Neil Richardson, Kurt H. Weiner +2 more | 2003-03-04 |
| 6524873 | Continuous movement scans of test structures on semiconductor integrated circuits | Akella V. S. Satya, Bin-Ming Benjamin Tsai, Neil Richardson, David J. Walker | 2003-02-25 |
| 6211518 | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments | Neil Richardson, Farid Askary, Stefano E. Concina, Kevin M. Monahan | 2001-04-03 |
| 6087659 | Apparatus and method for secondary electron emission microscope | David J. Walker, Fred Babian, Travis Wolfe | 2000-07-11 |
| 6066849 | Scanning electron beam microscope | Douglas K. Masnaghetti, Stefano E. Concina, Stanley Sun, Waiman Ng | 2000-05-23 |
| 5973323 | Apparatus and method for secondary electron emission microscope | David J. Walker, Fred Babian, Travis Wolfe | 1999-10-26 |
| 5869833 | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments | Neil Richardson, Farid Askary, Stefano E. Concina, Kevin M. Monahan | 1999-02-09 |