Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6873747 | Method for measurement of pitch in metrology and imaging systems | — | 2005-03-29 |
| 6211518 | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments | Neil Richardson, Stefano E. Concina, Kevin M. Monahan, David L. Adler | 2001-04-03 |
| 5869833 | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments | Neil Richardson, Stefano E. Concina, Kevin M. Monahan, David L. Adler | 1999-02-09 |
| 4774416 | Large cross-sectional area molecular beam source for semiconductor processing | Mohammad Farnaam, Mehdi Balooch | 1988-09-27 |