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Opto-thermal annealing methods for forming metal gate and fully silicided gate-field effect transistors |
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Formation of improved SOI substrates using bulk semiconductor wafers |
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2011-04-26 |
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2010-08-31 |
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Strained semiconductor device and method of making same |
Jin-Ping Han, Judson R. Holt |
2010-08-10 |
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Formation of improved SOI substrates using bulk semiconductor wafers |
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2008-11-18 |
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Method of forming substantially L-shaped silicide contact for a semiconductor device |
Zhijiong Luo, Huilong Zhu, Yung Fu Chong, Kern Rim, Nivo Rovedo |
2008-10-28 |
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Opto-thermal annealing methods for forming metal gate and fully silicided gate field effect transistors |
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Structure to use an etch resistant liner on transistor gate structure to achieve high device performance |
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2007-12-11 |
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2006-06-20 |
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Selective and anisotropic dry etching |
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1988-03-29 |