Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5986263 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Yukio Matsuyama, Yuji Takagi +3 more | 1999-11-16 |
| 5463667 | Inspection method for soldered joints using x-ray imaging and apparatus therefor | Toshiaki Ichinose, Takanori Ninomiya, Kozo Nakahata, Toshimitsu Hamada, Toshihiko Ayabe | 1995-10-31 |
| 4814615 | Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure | Satoru Fushimi, Yasuo Nakagawa, Hitoshi Kubota, Hiroya Koshishiba | 1989-03-21 |
| 4788577 | Substrate surface deflecting device | Nobuyuki Akiyama, Yukio Kembo, Toshihiko Nakata | 1988-11-29 |
| 4777641 | Method and apparatus for alignment | Akira Inagaki, Yukio Kembo, Ryuichi Funatsu, Keiichi Okamoto, Yoshihiro Komeyama | 1988-10-11 |
| 4708484 | Projection alignment method and apparatus | Yoshihiro Komeyama, Yukio Kembo, Ryuuichi Funatsu, Akira Inagaki, Minoru Ikeda +1 more | 1987-11-24 |
| 4666291 | Light-exposure apparatus | Motoya Taniguchi, Ryuichi Funatsu, Yukio Kembo, Akira Inagaki | 1987-05-19 |
| 4647196 | Surface flaw detection method | Kazuo Yamaguchi, Nobuyuki Akiyama, Juro Endo | 1987-03-03 |
| 4556797 | Method and apparatus for detecting edge of fine pattern on specimen | Toshimitsu Hamada, Hiroshi Makihira, Kazushi Yoshimura | 1985-12-03 |
| 4504045 | Wafer transforming device | Yukio Kenbo, Nobuyuki Akiyama, Mitsuyoshi Koizumi | 1985-03-12 |
| 4449818 | Method of inspecting microscopic surface defects | Kazuo Yamaguchi, Nobuyuki Akiyama, Juro Endo | 1984-05-22 |
| 4447731 | Exterior view examination apparatus | Yukio Kembo, Nobuyuki Akiyama, Nobuhiko Aoki | 1984-05-08 |
| 4242702 | Apparatus for automatically checking external appearance of object | Nobuyuki Akiyama, Yoshimasa Oshima | 1980-12-30 |
| 4213117 | Method and apparatus for detecting positions of chips on a semiconductor wafer | Yukio Kembo, Hiroshi Makihira | 1980-07-15 |