Issued Patents All Time
Showing 51–75 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7368729 | Method, apparatus and system for specimen fabrication by using an ion beam | Kaoru Umemura, Muneyuki Fukuda | 2008-05-06 |
| 7326942 | Ion beam system and machining method | Muneyuki Fukuda, Yoshinori Nakayama, Masaki Hasegawa, Satoshi Tomimatsu | 2008-02-05 |
| 7268356 | Method and apparatus for specimen fabrication | Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya, Mitsuo Tokuda +3 more | 2007-09-11 |
| 7242013 | Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor | Muneyuki Fukuda | 2007-07-10 |
| 7205554 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2007-04-17 |
| 7205560 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2007-04-17 |
| 7200506 | Method for failure analysis and system for failure analysis | Satoshi Tomimatsu, Muneyuki Fukuda, Kaoru Umemura | 2007-04-03 |
| 7095021 | Method, apparatus and system for specimen fabrication by using an ion beam | Kaoru Umemura, Muneyuki Fukuda | 2006-08-22 |
| 6977376 | Method of prevention charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Satoshi Tomimatsu | 2005-12-20 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2005-08-09 |
| 6894287 | Microfabrication apparatus and microfabrication method | Muneyuki Fukuda, Satoshi Tomimatsu, Osamu Watanabe | 2005-05-17 |
| 6858851 | Apparatus for specimen fabrication and method for specimen fabrication | Satoshi Tomimatsu, Muneyuki Fukuda | 2005-02-22 |
| 6794663 | Method and apparatus for specimen fabrication | Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya, Mitsuo Tokuda +3 more | 2004-09-21 |
| 6781125 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2004-08-24 |
| 6774363 | Method of preventing charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Satoshi Tomimatsu | 2004-08-10 |
| 6717156 | Beam as well as method and equipment for specimen fabrication | Masakazu Sugaya, Muneyuki Fukuda, Kaoru Umemura, Hidemi Koike | 2004-04-06 |
| 6664552 | Method and apparatus for specimen fabrication | Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya, Mitsuo Tokuda +3 more | 2003-12-16 |
| 5877498 | Method and apparatus for X-ray analyses | Aritoshi Sugimoto, Yoshimi Sudo, Tokuo Kure, Ken Ninomiya, Katsuhiro Kuroda +3 more | 1999-03-02 |
| 5714757 | Surface analyzing method and its apparatus | Naoshi Itabashi, Kozo Mochiji, Seiji Yamamoto, Satoshi Osabe, Keiichi Kanehori | 1998-02-03 |
| 5594246 | Method and apparatus for x-ray analyses | Yoshimi Sudo, Tokuo Kure, Ken Ninomiya, Katsuhiro Kuroda, Takashi Nishida +2 more | 1997-01-14 |
| 5481109 | Surface analysis method and apparatus for carrying out the same | Ken Ninomiya, Hideo Todokoro, Tokuo Kure, Yasuhiro Mitsui, Katsuhiro Kuroda | 1996-01-02 |
| 5012109 | Charged particle beam apparatus | Setsuo Nomura, Eisuke Mitani | 1991-04-30 |
| 4851673 | Secondary ion mass spectrometer | Eiichi Izumi, Hiroshi Iwamoto, Eisuke Mitani | 1989-07-25 |
| 4841143 | Charged particle beam apparatus | Hifumi Tamura, Kaoru Umemura | 1989-06-20 |
| 4774433 | Apparatus for generating metal ions | Yoshinori Ikebe, Hifumi Tamura, Eiichi Izumi | 1988-09-27 |