Issued Patents All Time
Showing 26–50 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8779380 | Ion beam device | Shinichi Matsubara, Norihide Saho, Masahiro Yamaoka, Noriaki Arai | 2014-07-15 |
| 8618520 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2013-12-31 |
| 8563944 | Ion beam device | Shinichi Matsubara, Norihide Saho, Noriaki Arai, Tohru Ishitani | 2013-10-22 |
| 8530865 | Gas field ion source, charged particle microscope, and apparatus | Shinichi Matsubara, Takashi Ohshima, Satoshi Tomimatsu, Tomihiro Hashizume, Tohru Ishitani | 2013-09-10 |
| 8481980 | Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample | Satoshi Tomimatsu, Kaoru Umemura, Noriyuki Kaneoka, Koji Ishiguro | 2013-07-09 |
| 8455841 | Ion microscope | Norihide Saho, Hiroyuki Tanaka, Noriaki Arai, Yoichi Ose | 2013-06-04 |
| 8431891 | Dual beam apparatus with tilting sample stage | Satoshi Tomimatsu, Noriyuki Kaneoka, Kaoru Umemura, Koji Ishiguro | 2013-04-30 |
| 8263943 | Ion beam device | Shinichi Matsubara, Norihide Saho, Noriaki Arai, Tohru Ishitani | 2012-09-11 |
| 8222618 | Method and apparatus for processing a microsample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2012-07-17 |
| 8115184 | Gas field ion source, charged particle microscope, and apparatus | Shinichi Matsubara, Takashi Ohshima, Satoshi Tomimatsu, Tomihiro Hashizume, Tohru Ishitani | 2012-02-14 |
| 7989782 | Apparatus and method for specimen fabrication | Satoshi Tomimatsu, Miyuki Takahashi, Muneyuki Fukuda | 2011-08-02 |
| 7952083 | Ion beam system and machining method | Muneyuki Fukuda, Yoshinori Nakayama, Masaki Hasegawa, Satoshi Tomimatsu | 2011-05-31 |
| 7897936 | Method and apparatus for specimen fabrication | Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya, Mitsuo Tokuda +3 more | 2011-03-01 |
| 7888639 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2011-02-15 |
| 7725278 | Method for failure analysis and system for failure analysis | Satoshi Tomimatsu, Muneyuki Fukuda, Kaoru Umemura | 2010-05-25 |
| 7709062 | Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device | Muneyuki Fukuda, Isamu Sekihara, Satoshi Tomimatsu, Kaoru Umemura | 2010-05-04 |
| 7700931 | Ion beam processing apparatus | Satoshi Tomimatsu, Noriyuki Kaneoka, Kaoru Umemura, Koji Ishiguro | 2010-04-20 |
| 7696496 | Apparatus for ion beam fabrication | Satoshi Tomimatsu, Noriyuki Kaneoka, Kaoru Umemura, Koji Ishiguro | 2010-04-13 |
| 7667212 | Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor | Muneyuki Fukuda | 2010-02-23 |
| 7550750 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2009-06-23 |
| 7482603 | Apparatus and method for specimen fabrication | Satoshi Tomimatsu, Miyuki Takahashi, Muneyuki Fukuda | 2009-01-27 |
| 7470918 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2008-12-30 |
| 7465945 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2008-12-16 |
| 7453072 | Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor | Muneyuki Fukuda | 2008-11-18 |
| 7372050 | Method of preventing charging, and apparatus for charged particle beam using the same | Muneyuki Fukuda, Satoshi Tomimatsu | 2008-05-13 |