Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663468 | Method for polishing surface of semiconductor device substrate | Yoshio Kawamura, Kan Yasui, Masahiko Sato, Souichi Katagiri, Masayuki Nagasawa +2 more | 2003-12-16 |
| 5714757 | Surface analyzing method and its apparatus | Naoshi Itabashi, Kozo Mochiji, Hiroyasu Shichi, Seiji Yamamoto, Keiichi Kanehori | 1998-02-03 |